{"id":2657,"date":"2025-04-21T13:47:51","date_gmt":"2025-04-21T05:47:51","guid":{"rendered":"http:\/\/www.xzclass.com\/?p=2657"},"modified":"2025-07-08T10:18:44","modified_gmt":"2025-07-08T02:18:44","slug":"%e4%bb%8e%e5%85%a5%e9%97%a8%e5%88%b0%e6%94%be%e5%bc%83%ef%bc%8c%e8%8a%af%e7%89%87%e7%9a%84%e8%af%a6%e7%bb%86%e5%88%b6%e9%80%a0%e6%b5%81%e7%a8%8b%ef%bc%81","status":"publish","type":"post","link":"http:\/\/www.xzclass.com\/?p=2657","title":{"rendered":"\u4ece\u5165\u95e8\u5230\u653e\u5f03\uff0c\u82af\u7247\u7684\u8be6\u7ec6\u5236\u9020\u6d41\u7a0b\uff01"},"content":{"rendered":"

\u4e0a\u4e00\u671f\uff0c\u5c0f\u67a3\u541b\u4ecb\u7ecd\u4e86\u6676\u5706\u7684\u5236\u5907\u6d41\u7a0b\uff08<\/span>\u94fe\u63a5<\/a>\uff09\u3002<\/span><\/p>\n

\n

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\u7845\u952d\u548c\u6676\u5706<\/span><\/p>\n

\n

\u4eca\u5929\uff0c\u6211\u4eec\u7ee7\u7eed\u5f80\u4e0b\u8bb2\uff0c\u8bf4\u8bf4\u82af\u7247\uff08\u6676\u7c92\uff09\u7684\u5236\u4f5c\u6d41\u7a0b\u3002<\/span><\/p>\n

\u8fd9\u4e2a\u73af\u8282\uff0c\u662f\u82af\u7247\u5236\u9020\u8fc7\u7a0b\u4e2d\u6700\u96be\u7684\u90e8\u5206\u3002\u6211\u5c3d\u91cf\u8bb2\u5f97\u901a\u4fd7\u6613\u61c2\u4e00\u4e9b\uff0c\u4e5f\u5e0c\u671b\u5927\u5bb6\u80fd\u8010\u5fc3\u770b\u5b8c\u3002<\/p>\n

\u2588<\/span>\u00a0\u6c27\u5316<\/span><\/p>\n

\u9996\u5148\uff0c\u5728\u5207\u5272\u548c\u629b\u5149\u540e\u7684\u6676\u5706\u4e0a\uff0c\u6211\u4eec\u8981\u5148\u505a\u4e00\u5c42\u6c27\u5316\u3002<\/span><\/p>\n

\u6c27\u5316\u7684\u76ee\u7684\uff0c\u662f\u5728\u8106\u5f31\u7684\u6676\u5706\u8868\u9762\uff0c\u5f62\u6210\u4e00\u5c42\u4fdd\u62a4\u819c\uff08\u6c27\u5316\u5c42<\/span>\uff09\u3002\u6c27\u5316\u5c42\u53ef\u4ee5\u9632\u6b62\u6676\u5706\u53d7\u5230\u5316\u5b66\u6742\u8d28\u3001\u6f0f\u7535\u6d41\u548c\u523b\u8680\u7b49\u5f71\u54cd\u3002<\/span><\/span><\/p>\n

\n

<\/section>\n

\n

\u6c27\u5316\u7684\u5de5\u827a\uff0c\u5305\u62ec\u70ed\u6c27\u5316\u6cd5\u3001\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6cd5\uff08PECVD\uff09\u3001\u7535\u5316\u5b66\u9633\u6781\u6c27\u5316\u7b49\u3002<\/span><\/p>\n

\u00a0<\/span><\/p>\n

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\n

\u6839\u636e\u6c27\u5316\u65f6\u6240\u4f7f\u7528\u7684\u6c14\u4f53\uff0c\u6c27\u5316\u4e5f\u5206\u4e3a\u5e72\u6cd5\u6c27\u5316\u548c\u6e7f\u6cd5\u6c27\u5316\u3002<\/span><\/p>\n

\n

<\/section>\n

\n

\u5e72\u6cd5\u6c27\u5316\uff0c\u901a\u8fc7\u8f93\u5165\u7eaf\u6c27\uff0c\u4f7f\u5176\u5728\u6676\u5706\u8868\u9762\u6d41\u52a8\uff0c\u4ece\u7845\u8fdb\u884c\u53cd\u5e94\uff0c\u5f62\u6210\u4e8c\u6c27\u5316\u7845\u5c42\u3002\u6e7f\u6cd5\u6c27\u5316\uff0c\u662f\u540c\u65f6\u4f7f\u7528\u6c27\u6c14\u548c\u9ad8\u6eb6\u89e3\u5ea6\u7684\u6c34\u84b8\u6c14\u3002<\/span><\/p>\n

\u5e72\u6cd5\u6c27\u5316\u7684\u901f\u5ea6\u6162\uff0c\u4f46\u5f62\u6210\u7684\u6c27\u5316\u5c42\u5f88\u8584\uff0c\u800c\u4e14\u81f4\u5bc6\u3002\u6e7f\u6cd5\u6c27\u5316\u7684\u901f\u5ea6\u5feb\uff0c\u4f46\u4fdd\u62a4\u5c42\u76f8\u5bf9\u8f83\u539a\uff0c\u4e14\u5bc6\u5ea6\u8f83\u4f4e\u3002<\/span><\/p>\n

\n

\u76ee\u524d\uff0c\u5e72\u6cd5\u6c27\u5316\u662f\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u7684\u4e3b\u6d41\u6280\u672f\u3002\u6e7f\u6cd5\u6c27\u5316\u66f4\u591a\u7528\u4e8e\u975e\u5173\u952e\u5c42\u6216\u7279\u5b9a\u539a\u819c\u9700\u6c42\u573a\u666f\u3002<\/span><\/p>\n

\u2588<\/span>\u00a0\u5149\u523b\uff08\u6d82\u80f6\u3001\u524d\u70d8\u3001\u66dd\u5149\u3001\u540e\u70d8\u3001\u663e\u5f71\uff09<\/span><\/p>\n

\u63a5\u4e0b\u6765\uff0c\u7ec8\u4e8e\u5230\u4e86\u6700\u6700\u6700\u91cd\u8981\u7684\u73af\u8282\u2014\u2014<\/span>\u5149\u523b<\/span>\u3002<\/span><\/p>\n

\n

\u6211\u4eec\u8fd9\u51e0\u5e74\u4e00\u76f4\u803f\u803f\u4e8e\u6000\u88ab\u201c\u5361\u8116\u5b50\u201d\u7684\u5149\u523b\u673a\uff0c\u5c31\u548c\u8fd9\u4e2a\u73af\u8282\u6709\u5173\u3002<\/span><\/p>\n

\u6240\u8c13\u201c\u5149\u523b\u201d\uff0c\u5176\u5b9e\u7b80\u5355\u6765\u8bf4\uff0c\u5c31\u662f\u50cf\u5370\u5237\u673a\u4e00\u6837\uff0c\u628a\u82af\u7247\u7535\u8def\u56fe\u7ed9\u201c\u523b\u201d\u5728\u6676\u5706\u4e0a\u3002<\/span><\/p>\n

\n

<\/section>\n

\n

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\u9996\u5148\uff0c\u662f<\/span>\u6d82\u80f6<\/span>\u3002<\/span><\/p>\n

\u8fd9\u4e2a\u80f6\uff0c\u53eb\u505a\u5149\u523b\u80f6\uff0c\u6709\u65f6\u5019\u4e5f\u53eb\u5149\u963b\uff0c\u662f\u4e00\u79cd\u5149\u654f\u6750\u6599\u3002<\/span><\/p>\n

\n

<\/section>\n

\n

\u5149\u523b\u80f6\u6709\u4e24\u79cd\u7c7b\u578b\uff1a\u6b63\u80f6\u548c<\/span>\u8d1f\u80f6\u3002<\/span><\/span><\/p>\n

\u6b63\u80f6\uff0c\u88ab\u7279\u5b9a\u7684\u5149\u675f\u7167\u5c04\uff08\u66dd\u5149\uff09\u4e4b\u540e\uff0c\u5206\u5b50\u7ed3\u6784\u4f1a\u53d1\u751f\u53d8\u5316\uff0c\u53d8\u5f97\u5bb9\u6613\u6eb6\u89e3\u3002\u8d1f\u80f6\uff0c\u6070\u597d\u76f8\u53cd\uff0c\u88ab\u7167\u5c04\u4e4b\u540e\uff0c\u4f1a\u53d8\u5f97\u96be\u4ee5\u6eb6\u89e3\u3002\u5927\u90e8\u5206\u60c5\u51b5\uff0c\u7528\u6b63\u80f6\u3002<\/span><\/p>\n

\u6d82\u80f6\u65f6\uff0c\u5148\u8ba9\u6676\u5706\u57281000~5000RPM\u7684\u901f\u5ea6\u4e0b\u65cb\u8f6c\u3002\u7136\u540e\uff0c\u5c06\u5149\u523b\u80f6\u5c11\u91cf\u5012\u5728\u6676\u5706\u7684\u4e2d\u5fc3\u3002\u5149\u523b\u80f6\u4f1a\u56e0\u4e3a\u79bb\u5fc3\u529b\u7684\u4f5c\u7528\uff0c\u9010\u6e10\u6269\u6563\u5230\u6574\u4e2a\u6676\u5706\u7684\u8868\u9762\uff0c\u5f62\u6210\u4e00\u5c421\u5230200\u5fae\u7c73\u539a\u7684\u5747\u5300\u6d82\u5c42\u3002<\/span><\/p>\n

\n

<\/section>\n
\u6d82\u80f6<\/section>\n

\n

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\u6d82\u80f6\u5b8c\u6210\u540e\uff0c\u4f1a\u5bf9\u6676\u5706\u8fdb\u884c\u8f6f\u70e4\u52a0\u70ed\uff0c\u8ba9\u5149\u523b\u80f6\u7a0d\u5fae\u56fa\u5316\u4e00\u4e9b\u3002\u8fd9\u4e2a\u6b65\u9aa4\u53eb<\/span>\u201c\u524d\u70d8\u201d<\/span>\u3002<\/span><\/p>\n

\u63a5\u7740\uff0c\u8be5\u5149\u523b\u673a\u767b\u573a\u4e86\uff0c\u8981\u8fdb\u884c<\/span>\u66dd\u5149<\/span>\u3002<\/span><\/p>\n

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\n

<\/section>\n

\u63a9\u6a21<\/span><\/p>\n

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\u7cbe\u7ec6\u7684\u7535\u8def\u56fe\u6848\uff0c\u5c31\u8fd9\u6837\u201c\u6295\u5f71<\/span>\u201d\u5728\u6676\u5706\u4e0a\u3002<\/span><\/span><\/p>\n

\n

<\/p>\n

\u4ee5\u6b63\u6027\u5149\u523b\u80f6\u4e3a\u4f8b\uff0c\u88ab\u7167\u5c04\u4f4d\u7f6e\u7684\u5149\u523b\u80f6\uff0c\u4f1a\u53d8\u5f97\u5bb9\u6613\u6eb6\u89e3\u3002\u672a\u88ab\u7167\u5c04\u7684\u5149\u523b\u80f6\uff0c\u5219\u6beb\u53d1\u65e0\u635f\u3002<\/span><\/p>\n

\n

\u56fa\u5b9a\u6676\u5706\u548c\u63a9\u6a21\u7684\u673a\u68b0\u4f4d\u4e0d\u505c\u5730\u79fb\u52a8\uff0c\u5149\u675f\u4e0d\u505c\u5730\u7167\u5c04\u3002\u6700\u7ec8\uff0c\u5728\u6574\u4e2a\u6676\u5706\u4e0a\uff0c\u5b8c\u6210\u6570\u5341\u4e2a\u81f3\u6570\u767e\u4e2a\u82af\u7247\u7684\u7535\u8def\u201c\u7ed8\u5236\u201d\u3002<\/span><\/p>\n

\n

<\/section>\n

\u5149\u523b\u673a\u5de5\u4f5c\u8fc7\u7a0b<\/span><\/p>\n

\n

<\/section>\n

\n

\u7845\u7247\u4ece\u5149\u523b\u673a\u51fa\u6765\u540e\uff0c\u8fd8\u8981\u7ecf\u5386\u4e00\u6b21\u52a0\u70ed\u70d8\u7119\u7684\u8fc7\u7a0b\uff08<\/span>120~180\u2103\u7684\u73af\u5883\u4e0b\uff0c\u70d8\u711920\u5206\u949f\uff09\uff0c\u7b80\u79f0<\/span>\u540e\u70d8<\/span>\u3002<\/span><\/span><\/p>\n

<\/section>\n
\u540e\u70d8\u7684\u76ee\u7684\uff0c\u662f\u8ba9\u5149\u523b\u80f6\u4e2d\u7684\u5149\u5316\u5b66\u53cd\u5e94\u5145\u5206\u5b8c\u6210\uff0c\u5f25\u8865\u66dd\u5149\u5f3a\u5ea6\u4e0d\u8db3\u7684\u95ee\u9898\u3002\u540c\u65f6\uff0c\u540e\u70d8\u8fd8\u80fd\u51cf\u5c11\u5149\u523b\u80f6\u663e\u5f71\u540e\uff0c\u56e0\u4e3a\u9a7b\u6ce2\u6548\u5e94\u4ea7\u751f\u7684\u4e00\u5708\u5708\u7eb9\u8def\u3002<\/span><\/section>\n

\u63a5\u4e0b\u6765\uff0c\u662f<\/span>\u663e\u5f71<\/span>\u3002<\/span><\/p>\n

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<\/p>\n

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<\/section>\n
<\/section>\n

\u2588<\/span>\u00a0\u5173\u4e8e\u5149\u523b\u673a<\/span><\/p>\n

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\u4f20\u7edf\u7684\u5149\u523b\u6280\u672f\uff0c\u901a\u5e38\u4f7f\u7528\u6df1\u7d2b\u5916\u5149\uff08DUV\uff09\u4f5c\u4e3a\u5149\u6e90\uff0c\u6ce2\u957f\u5927\u7ea6\u5728193nm\uff08\u7eb3\u7c73\uff09\u3002\u5149\u6ce2\u7684\u6ce2\u957f\uff0c\u9650\u5236\u4e86\u5149\u523b\u5de5\u827a\u4e2d\u6700\u5c0f\u53ef\u5236\u9020\u7684\u7279\u5f81\u5c3a\u5bf8\uff08\u5373\u5206\u8fa8\u7387\u6781\u9650\uff09\u3002\u968f\u7740\u82af\u7247\u5236\u7a0b\u7684\u4e0d\u65ad\u6f14\u8fdb\uff0c\u4f20\u7edf\u7684DUV\u5149\u523b\u6280\u672f\uff0c\u9010\u6e10\u65e0\u6cd5\u6ee1\u8db3\u8981\u6c42\u3002<\/span><\/p>\n

\u4e8e\u662f\uff0c\u5c31\u6709\u4e86<\/span>EUV\u5149\u523b\u673a<\/span>\u3002<\/span><\/p>\n

EUV\u5149\u523b\u673a\u4f7f\u7528\u6781\u7d2b\u5916\u5149\uff08<\/span>Extreme Ultra-Violet\uff0cEUV\uff09\u4f5c\u4e3a\u5149\u6e90\uff0c\u6ce2\u957f\u4ec5\u4e3a13.5nm\uff0c\u8fdc\u8fdc\u5c0f\u4e8eDUV\u3002\u8fd9\u4f7f\u5f97EUV\u5149\u523b\u80fd\u591f\u521b\u5efa\u66f4\u5c0f\u7684\u7279\u5f81\u5c3a\u5bf8\uff0c\u6ee1\u8db3\u5148\u8fdb\u82af\u7247\u5236\u7a0b\uff08\u59827nm\u30015nm\u30013nm\uff09\u7684\u5236\u9020\u9700\u6c42\u3002<\/span><\/p>\n

EUV\u5149\u523b\u5bf9\u5149\u675f\u7684\u96c6\u4e2d\u5ea6\u8981\u6c42\u6781\u4e3a\u4e25\u683c\uff0c\u5de5\u827a\u7cbe\u5ea6\u8981\u6c42\u4e5f\u975e\u5e38\u53d8\u6001\u3002\u4f8b\u5982\uff0cEUV\u5149\u523b\u673a\u7528\u4e8e\u53cd\u5c04\u7684\u955c\u5b50\u957f\u5ea6\u4e3a30cm\uff08\u5398\u7c73\uff09\uff0c\u8868\u9762\u8d77\u4f0f\u4e0d\u5f97\u8d85\u8fc70.3nm\uff08\u7eb3\u7c73\uff09\u3002\u76f8\u5f53\u4e8e\u4fee\u4e00\u6761\u4ece\u5317\u4eac\u5230\u4e0a\u6d77\u7684\u94c1\u8f68\uff0c\u8981\u6c42\u94c1\u8f68\u7684\u8d77\u4f0f\u4e0d\u80fd\u8d85\u8fc71mm\u3002<\/span><\/p>\n

\u6781\u9ad8\u7684\u6280\u672f\u6307\u6807\u8981\u6c42\uff0c\u4f7f\u5f97EUV\u5149\u523b\u673a\u7684\u5236\u9020\u53d8\u5f97\u975e\u5e38\u975e\u5e38\u56f0\u96be\u3002\u5168\u7403\u8303\u56f4\u5185\u80fd\u591f<\/span>\u7814\u53d1\u548c\u5236\u9020EUV\u5149\u523b\u673a\u7684\u4f01\u4e1a\u5c48\u6307\u53ef\u6570\u3002\u800c\u5c45\u4e8e\u9886\u5148\u5730\u4f4d\u7684\uff0c\u5c31\u662f\u5927\u540d\u9f0e\u9f0e\u7684\u8377\u5170ASML<\/span><\/span>\uff08\u963f\u65af\u9ea6\uff09\u516c\u53f8\u3002<\/span><\/span><\/p>\n

\u00a0<\/span><\/p>\n

<\/section>\n

\u00a0<\/span><\/p>\n

\u6839\u636eASML\u900f\u9732\u7684\u4fe1\u606f\uff0c\u6bcf\u4e00\u53f0EUV\u5149\u523b\u673a\uff0c\u62e5\u670910\u4e07\u4e2a\u96f6\u4ef6\u30014\u4e07\u4e2a\u87ba\u6813\u30013\u5343\u6761\u7535\u7ebf\u30012\u516c\u91cc\u957f\u8f6f\u7ba1\u3002EUV\u5149\u523b\u673a\u91cc\u9762\u7684\u7edd\u5927\u591a\u6570\u96f6\u4ef6\uff0c\u90fd\u662f\u6765\u81ea\u5404\u4e2a\u56fd\u5bb6\u7684\u6700\u5148\u8fdb\u4ea7\u54c1\uff0c\u4f8b\u5982\u7f8e\u56fd\u7684\u5149\u6805\u3001\u5fb7\u56fd\u7684\u955c\u5934\u3001\u745e\u5178\u7684\u8f74\u627f\u3001\u6cd5\u56fd\u7684\u9600\u4ef6\u7b49\u3002<\/span><\/p>\n

\u5355\u53f0EUV\u5149\u523b\u673a\u7684\u9020\u4ef7\u9ad8\u8fbe1\u4ebf\u7f8e\u5143\uff0c\u91cd\u91cf\u5219\u4e3a180\u5428\u3002\u6bcf\u6b21\u8fd0\u8f93\uff0c\u8981\u52a8\u752840\u4e2a\u8d27\u67dc\u300120\u8f86\u5361\u8f66\uff0c\u6bcf\u6b21\u8fd0\u8f93\u9700\u89813\u67b6\u6b21\u8d27\u673a\u624d\u80fd\u8fd0\u5b8c\u3002\u6bcf\u6b21\u5b89\u88c5\u8c03\u8bd5\uff0c\u4e5f\u9700\u8981\u81f3\u5c11\u4e00\u5e74\u7684\u65f6\u95f4\u3002<\/span><\/p>\n

ASML\u7684EUV\u5149\u523b\u673a\u4ea7\u91cf\uff0c\u4e00\u5e74\u6700\u9ad8\u4e5f\u53ea\u670930\u90e8\uff0c\u800c\u4e14\u8fd8\u4e0d\u80af\u5356\u7ed9\u6211\u4eec\u3002\u6574\u4e2a\u82af\u7247\u4ea7\u4e1a\u91cc\u9762\uff0c\u201c\u5361\u8116\u5b50\u201d\u6700\u4e25\u91cd\u7684\uff0c\u5c31\u662f\u8fd9\u4e2aEUV\u5149\u523b\u673a\u3002<\/span><\/p>\n

\n

\u00a0<\/span><\/p>\n

\u2588<\/span>\u00a0\u523b\u8680<\/span><\/p>\n

\u597d\u4e86\uff0c\u7ee7\u7eed\u804a\u82af\u7247\u5236\u9020\u6d41\u7a0b\u3002<\/span><\/p>\n

\n

\u73b0\u5728\uff0c\u56fe\u6848\u867d\u7136\u662f\u663e\u73b0\u51fa\u6765\u4e86\uff0c\u4f46\u6211\u4eec\u53ea\u662f\u53bb\u6389\u4e86\u4e00\u90e8\u5206\u7684\u5149\u523b\u80f6\u3002\u6211\u4eec\u771f\u6b63\u8981\u53bb\u6389\u7684\uff0c\u662f\u4e0b\u9762\u7684\u6c27\u5316\u5c42\uff08<\/span>\u672a\u88ab\u5149\u523b\u80f6\u4fdd\u62a4\u7684\u90a3\u90e8\u5206\uff09\u3002<\/span><\/span><\/p>\n

\u00a0<\/span><\/p>\n

<\/section>\n

\u00a0<\/span><\/p>\n

\u4e5f\u5c31\u662f\u8bf4\uff0c\u6211\u4eec\u8fd8\u8981\u7ee7\u7eed\u5f80\u4e0b\u201c\u6316\u6d1e<\/span>\u201d\u3002<\/span><\/span><\/p>\n

\n

\u8fd9\u65f6\u8981\u91c7\u7528\u7684\u5de5\u827a\uff0c\u5c31\u662f\u523b\u8680\u3002<\/span><\/p>\n

\u523b\u8680\u5de5\u827a\u5206\u4e3a\u6e7f\u6cd5\u523b\u8680\u548c\u5e72\u6cd5\u523b\u8680\u4e24\u79cd\u3002<\/span><\/p>\n

\u6e7f\u6cd5\u523b\u8680\uff0c\u662f<\/span>\u5c06\u6676\u5706\u7247\u6d78\u5165\u5230\u542b\u6709\u7279\u5b9a\u5316\u5b66\u5242\u7684\u6db2\u4f53\u6eb6\u6db2\u4e2d\uff0c\u5229\u7528\u5316\u5b66\u53cd\u5e94\u6765\u6eb6\u89e3\u6389\u672a\u88ab\u5149\u523b\u80f6\u4fdd\u62a4\u7684\u534a\u5bfc\u4f53\u7ed3\u6784\uff08\u6c27\u5316\u819c\uff09\u3002<\/span><\/span><\/p>\n

\u5e72\u6cd5\u523b\u8680\uff0c\u662f\u4f7f\u7528<\/span>\u7b49\u79bb\u5b50\u4f53\u6216\u8005\u79bb\u5b50\u675f\u7b49\u6765\u5bf9\u6676\u5706\u7247\u8fdb\u884c\u8f70\u51fb\uff0c\u5c06\u672a\u88ab\u4fdd\u62a4\u7684\u534a\u5bfc\u4f53\u7ed3\u6784\u53bb\u9664\u3002<\/span><\/span><\/p>\n

\u523b\u8680\u5de5\u827a\u4e2d\uff0c\u6709\u4e24\u4e2a\u6982\u5ff5\u9700\u8981\u5173\u6ce8\u3002\u4e00\u662f\u5404\u5411\u540c\u6027\uff08\u5404\u5411\u5f02\u6027\uff09\uff0c\u4e8c\u662f\u9009\u62e9\u6bd4\u3002<\/span><\/p>\n

\n

<\/section>\n

\n

\u5982\u4e0a\u56fe\u6240\u793a\uff0c\u6e7f\u6cd5\u523b\u8680\u7684\u65f6\u5019\uff0c\u4f1a\u671d\u5404\u4e2a\u65b9\u5411\u8fdb\u884c\u523b\u8680\uff0c\u8fd9\u5c31\u53eb\u201c\u5404\u5411\u540c\u6027\u201d\u3002\u800c\u5e72\u6cd5\u523b\u8680\uff0c\u53ea\u671d\u5782\u76f4\u65b9\u5411\u8fdb\u884c\u523b\u8680\uff0c\u53eb\u201c\u5404\u5411\u5f02\u6027\u201d\u3002\u663e\u7136\u540e\u8005\u66f4\u597d\u3002<\/span><\/p>\n

\n

\u523b\u8680\u7684\u65f6\u5019\uff0c\u65e2\u523b\u8680\u4e86\u6c27\u5316\u5c42\uff0c\u4e5f\u523b\u8680\u4e86\u5149\u523b\u80f6\u3002<\/span>\u5728\u540c\u4e00\u523b\u8680\u6761\u4ef6\u4e0b\uff0c\u5149\u523b\u80f6\u7684\u523b\u8680\u901f\u7387\u4e0e\u88ab\u523b\u8680\u6750\u6599\uff08\u6c27\u5316\u5c42\uff09\u7684\u523b\u8680\u901f\u7387\u4e4b\u6bd4\uff0c\u5c31\u662f\u9009\u62e9\u6bd4\u3002\u663e\u7136\uff0c\u6211\u4eec\u9700\u8981\u5c3d\u53ef\u80fd\u5c11\u523b\u8680\u5149\u523b\u80f6\uff0c\u591a\u523b\u8680\u6c27\u5316\u5c42\u3002<\/span><\/p>\n

\n

<\/section>\n

\n

\u76ee\u524d\uff0c\u5e72\u6cd5\u523b\u8680\u5360\u636e\u4e86\u4e3b\u5bfc\u5730\u4f4d\uff0c\u662f\u4e1a\u754c\u7684\u4f18\u5148\u9009\u62e9\u3002<\/span><\/p>\n

\n

\u56e0\u4e3a\u5e72\u6cd5\u523b\u8680\u5177\u6709\u66f4\u5f3a\u7684\u4fdd\u771f\u6027\u3002\u800c\u6e7f\u6cd5\u523b\u8680\u7684\u65b9\u5411\u96be\u4ee5\u63a7\u5236\u3002\u5728\u7c7b\u4f3c3nm\u8fd9\u6837\u7684\u5148\u8fdb\u5236\u7a0b\u4e2d\uff0c\u5bb9\u6613\u5bfc\u81f4\u7ebf\u5bbd\u51cf\u5c0f\uff0c\u751a\u81f3\u635f\u574f\u7535\u8def\uff0c\u8fdb\u800c\u964d\u4f4e\u82af\u7247\u54c1\u8d28\u3002<\/span><\/p>\n

\n

\u2588<\/span>\u00a0\u63ba\u6742\uff08\u79bb\u5b50\u6ce8\u5165\uff09<\/span><\/p>\n

\u597d\u5566\uff0c\u201c\u6316\u6d1e<\/span>\u201d\u7684\u5de5\u827a\uff0c\u4ecb\u7ecd\u5b8c\u4e86\u3002<\/span><\/span><\/p>\n

\n

\u6b64\u65f6\u7684\u6676\u5706\u8868\u9762\uff0c\u5df2\u7ecf\u88ab\u523b\u51fa\u4e86\u5404\u5f0f\u5404\u6837\u7684\u6c9f\u69fd\u548c\u56fe\u5f62\u3002<\/span><\/span><\/p>\n

\n

\u63a5\u4e0b\u6765\uff0c\u6211\u4eec\u518d\u6765\u770b\u770b\u63ba\u6742\u5de5\u827a\u3002<\/span><\/p>\n

\u4e4b\u524d\u4ecb\u7ecd\u82af\u7247\u57fa\u7840\u77e5\u8bc6\uff08<\/span>\u534a\u5bfc\u4f53\u82af\u7247\uff0c\u5230\u5e95\u662f\u5982\u4f55\u5de5\u4f5c\u7684\uff1f<\/span><\/a>\uff09\u7684\u65f6\u5019\uff0c\u5c0f\u67a3\u541b\u63d0\u8fc7\uff0c\u6676\u4f53\u7ba1\u662f\u82af\u7247\u7684\u57fa\u672c\u7ec4\u6210\u5355\u5143\u3002\u800c\u6bcf\u4e00\u4e2a\u6676\u4f53\u7ba1\uff0c\u90fd\u662f\u57fa\u4e8ePN\u7ed3\u3002\u5982\u4e0b\u56fe\uff08MOSFET\u6676\u4f53\u7ba1\uff0cNPN\uff09\u6240\u793a\uff0c\u5305\u62ec\u4e86P\u9631\u3001N\u9631\u3001\u6c9f\u9053\u3001\u6805\u6781\uff0c\u7b49\u7b49\u3002<\/span><\/p>\n

\n

<\/section>\n

\n

\u524d\u9762\u7684\u5149\u523b\u548c\u523b\u8680\uff0c\u6211\u4eec\u53ea\u662f\u6316\u4e86\u6d1e\u3002\u63a5\u4e0b\u6765\uff0c\u6211\u4eec\u8981\u57fa\u4e8e\u8fd9\u4e9b\u6d1e\uff0c\u6784\u9020\u51faP\u9631\u3001N\u9631\u3002<\/span><\/p>\n

\u7eaf\u7845\u672c\u8eab\u662f\u4e0d\u5bfc\u7535\u7684\uff0c\u6211\u4eec\u9700\u8981\u8ba9\u4e0d\u5bfc\u7535\u7684\u7eaf\u7845\u6210\u4e3a\u534a\u5bfc\u4f53\uff0c\u5c31\u5fc5\u7136\u9700\u8981\u5411\u7845\u5185\u63ba\u5165\u4e00\u4e9b\u6742\u8d28\uff08\u79f0\u4e3a\u63ba\u6742\u5242\uff09\uff0c\u6539\u53d8\u5b83\u7684\u7535\u5b66\u7279\u6027\u3002<\/span><\/p>\n

\u4f8b\u5982\uff0c\u5411\u7845\u6750\u6599\u5185\u63ba\u5165\u78f7\u3001\u9511\u548c\u7837\uff0c\u5c31\u53ef\u4ee5\u5f97\u5230N\u9631\u3002\u63ba\u5165\u787c\u3001\u94dd\u3001\u9553\u548c\u94df\uff0c\u5c31\u53ef\u4ee5\u5f97\u5230P\u9631\u3002<\/span><\/p>\n

<\/section>\n

\n

N\u662f\u6709\u81ea\u7531\u7535\u5b50\u7684\u3002P\u6709\u5f88\u591a\u7a7a\u7a74\uff0c\u4e5f\u6709\u5c11\u91cf\u7684\u81ea\u7531\u7535\u5b50\u3002\u901a\u8fc7\u5728\u901a\u9053\u4e0a\u52a0\u4e00\u4e2a\u6805\u6781\uff0c\u52a0\u4e00\u4e2a\u7535\u538b\uff0c\u53ef\u4ee5\u5438\u5f15P\u91cc\u9762\u7684\u7535\u5b50\uff0c\u5f62\u6210\u4e00\u4e2a\u7535\u5b50\u7684\u901a\u9053\uff08\u6c9f\u9053\uff09\u3002\u5728\u4e24\u4e2aN\u52a0\u7535\u538b\uff0cNPN\u4e4b\u95f4\u5c31\u5f62\u6210\u4e86\u7535\u6d41\u3002<\/span><\/span><\/p>\n

\u00a0<\/span><\/p>\n

\u5982\u4e0b\u56fe\u6240\u793a\uff1a<\/span><\/span><\/p>\n

\u00a0<\/span><\/p>\n

<\/section>\n

\u00a0<\/span><\/p>\n

\u56fe\u4e2d\uff0c\u5e95\u4e0b\u5c31\u662fP<\/span>\u9631\u886c\u5e95\u3002\u4e24\u4e2a\u6d1e\u662fN<\/span><\/span>\u9631\u3002<\/span><\/span><\/p>\n

\u00a0<\/span><\/p>\n

\u4e5f\u5c31\u662f\u8bf4\uff0c\u505a\u8fd9\u4e2aNPN\u6676\u4f53\u7ba1\u65f6\uff0c\u5728\u6700\u5f00\u59cb\u6c27\u5316\u4e4b\u524d\uff0c\u5c31\u5df2\u7ecf\u91c7\u7528\u4e86\u79bb\u5b50\u6ce8\u5165\uff0c\u5148\u628a\u886c\u5e95\u505a\u4e86\u787c\u5143\u7d20\uff08\u542b\u5c11\u91cf\u78f7\u5143\u7d20\uff09\u63ba\u6742\uff0c\u53d8\u6210\u4e86P<\/span><\/span>\u9631\u886c\u5e95\u3002\uff08\u4e3a\u4e86\u65b9\u4fbf\u9605\u8bfb\uff0c\u8fd9\u4e2a\u6b65\u9aa4\u6211\u524d\u9762\u6ca1\u8bb2\u3002\uff09<\/span><\/span><\/p>\n

\u00a0<\/span><\/p>\n

\u73b0\u5728\uff0c\u6316\u6d1e\u7684\u90e8\u5206\uff0c\u5c31\u53ef\u4ee5\u505a<\/span><\/span>\u78f7\u5143\u7d20\u63ba\u6742\uff0c\u53d8\u6210N<\/span><\/span>\u9631\u3002<\/span><\/span><\/p>\n

\u00a0<\/span><\/p>\n

\u5927\u5bb6\u770b\u61c2\u4e86\u6ca1\uff1f\u63ba\u6742\u7684\u76ee\u7684\uff0c\u5c31\u662f\u521b\u9020PN\u7ed3\uff0c\u521b\u9020\u6676\u4f53\u7ba1\u3002<\/span><\/span><\/p>\n

\u63ba\u6742\uff0c\u5305\u62ec<\/span>\u70ed\u6269\u6563\uff08Diffusion\uff09<\/span>\u548c<\/span>\u79bb\u5b50\u6ce8\u5165\uff08Implant\uff09<\/span>\u4e24\u79cd\u5de5\u827a\u3002\u56e0\u4e3a\u70ed\u6269\u6563\u5de5\u827a\u56e0\u5176\u96be\u4ee5\u5b9e\u73b0\u9009\u62e9\u6027\u6269\u6563\uff0c\u6240\u4ee5\uff0c\u9664\u7279\u5b9a\u9700\u6c42\u4e4b\u5916\uff0c\u76ee\u524d\u5927\u90e8\u5206\u90fd\u662f\u4f7f\u7528\u79bb\u5b50\u6ce8\u5165\u5de5\u827a\u3002<\/span><\/p>\n

\u79bb\u5b50\u6ce8\u5165\uff0c\u5c31\u662f\u7528\u9ad8\u80fd\u7c92\u5b50\u675f\uff0c\u5c06\u6742\u8d28\u76f4\u63a5\u5c04\u5165\u5230\u7845\u7247\u4e2d\u3002<\/p>\n

\u79bb\u5b50\u6e90\u57fa\u672c\u4e0a\u90fd\u662f\u6ce8\u5165\u6c14\u4f53\uff08\u56e0\u4e3a\u65b9\u4fbf\u64cd\u4f5c\uff09\uff0c\u4f8b\u5982\u78f7\u70f7\uff08PH3\uff09\u6216\u8005\u4e09\u6c1f\u5316\u787c\uff08BF3\uff09\u3002\u6c14\u4f53\u901a\u8fc7\u79bb\u5316\u53cd\u5e94\u5ba4\u65f6\uff0c\u88ab\u9ad8\u901f\u7535\u5b50\u649e\u51fb\uff0c\u6c14\u4f53\u5206\u5b50\u7684\u7535\u5b50\u88ab\u649e\u98de\uff0c\u53d8\u6210\u79bb\u5b50\u72b6\u6001\u3002<\/p>\n

\u6b64\u65f6\u7684\u79bb\u5b50\u6210\u5206\u6bd4\u8f83\u590d\u6742\uff0c\u5305\u62ec\u787c\u79bb\u5b50\u3001\u6c1f\u79bb\u5b50\u7b49\u3002\u5c31\u8981\u901a\u8fc7\u8d28\u8c31\u5206\u6790\u4eea\uff0c\u6784\u5efa\u78c1\u573a\uff0c\u8ba9\u79bb\u5b50\u53d1\u751f\u504f\u8f6c\uff0c\u628a\u9700\u8981\u7684\u79bb\u5b50\u6311\u51fa\u6765\uff08\u4e0d\u540c\u7684\u79bb\u5b50\uff0c\u504f\u8f6c\u89d2\u5ea6\u4e0d\u4e00\u6837\uff09\uff0c\u7136\u540e\u649e\u5230\u6676\u5706\u4e0a\uff0c\u5b8c\u6210\u79bb\u5b50\u6ce8\u5165\u3002<\/p>\n

<\/section>\n

\u79bb\u5b50\u6ce8\u5165\u673a\u7684\u6784\u9020<\/span><\/p>\n

\uff08\u6765\u6e90\uff1a\u300a\u534a\u5bfc\u4f53\u5236\u9020\u6280\u672f\u5bfc\u8bba\u300b\uff09<\/span><\/p>\n

\n

\u6b64\u65f6\uff0c\u4e8c\u6c27\u5316\u7845\u5c42\uff08\u6c27\u5316\u5c42\uff09\u5c31\u53d8\u6210\u4e86\u79bb\u5b50\u6ce8\u5165\u7684\u963b\u6321\u5c42\u3002<\/span><\/p>\n

\n

\u79bb\u5b50\u6ce8\u5165\u4e4b\u540e\uff0c\u9700\u8981\u5c06\u7845\u8868\u9762\u52a0\u70ed\u5230900\u2103\uff0c\u8fdb\u884c\u9000\u706b\u3002<\/span><\/p>\n

\u9000\u706b\uff0c\u53ef\u4ee5\u8ba9\u6ce8\u5165\u7684\u63ba\u6742\u79bb\u5b50\u8fdb\u4e00\u6b65\u5747\u5300\u6269\u6563\u5230\u7845\u7247\u4e2d\u3002\u540c\u65f6\uff0c\u4e5f\u53ef\u4ee5\u4fee\u590d\u79bb\u5b50\u6ce8\u5165\u5bf9\u6676\u5706\u9020\u6210\u7684\u635f\u4f24\uff08\u79bb\u5b50\u6ce8\u5165\u65f6\uff0c\u4f1a\u7834\u574f\u7845\u886c\u5e95\u7684\u6676\u683c\uff09\u3002<\/span><\/p>\n

\n

\u2588<\/span>\u00a0\u8584\u819c\u6c89\u79ef<\/span><\/p>\n

\u524d\u9762\u8bf4\u4e86\u90a3\u4e48\u591a\uff0c\u6211\u4eec\u90fd\u662f\u5728\u201c\u6316\u6d1e\u201d\u3002\u63a5\u4e0b\u6765\uff0c\u6211\u4eec\u8981\u5f00\u59cb\u201c\u76d6\u697c\u201d\u3002<\/span><\/p>\n

\u6211\u4eec\u5148\u770b\u4e00\u4e2a\u6210\u54c1\u82af\u7247\u7684\u67b6\u6784\u56fe\uff08\u5c40\u90e8\u793a\u4f8b\uff09\uff1a<\/span><\/p>\n

<\/section>\n

\u5927\u5bb6\u4f1a\u53d1\u73b0\uff0c\u8fd9\u662f\u4e00\u4e2a\u975e\u5e38\u590d\u6742\u7684\u7acb\u4f53\u7ed3\u6784\u3002\u5b83\u6709\u5f88\u591a\u5f88\u591a\u7684\u5c42\u7ea7\uff0c\u6709\u70b9\u50cf\u5927\u697c\uff0c\u4e5f\u6709\u70b9\u50cf\u590d\u6742\u7684\u7acb\u4f53\u4ea4\u901a\u7f51\u3002<\/span><\/p>\n

\n

<\/section>\n

\n

\u5728\u8fd9\u4e2a\u67b6\u6784\u7684\u6700\u5e95\u4e0b\uff0c\u5c31\u662f\u6211\u4eec\u524d\u9762\u8f9b\u82e6\u6253\u9020\u7684\u7845\u886c\u5e95\uff0c\u4e5f\u5c31\u662f\u57fa\u5e95\u3002<\/span><\/p>\n

\n

\u4f5c\u4e3a\u82af\u7247\u5927\u53a6\u7684\u4f4e\u7ea7\uff0c\u886c\u5e95\u5fc5\u987b<\/span>\u6709\u5f88\u597d\u7684\u70ed\u7a33\u5b9a\u6027\u548c\u673a\u68b0\u6027\u80fd\uff0c\u8fd8\u9700\u8981\u8d77\u5230\u4e00\u5b9a\u7684\u7535\u5b66\u9694\u79bb\u4f5c\u7528\uff0c\u9632\u5e72\u6270\u3002<\/span><\/p>\n

\n

<\/section>\n

\n

\u886c\u5e95\u4e0a\uff0c\u662f\u5927\u91cf\u7684\u6676\u4f53\u7ba1\u4e3b\u4f53\u90e8\u5206\u3002\u5728\u886c\u5e95\u7684\u4e0a\u5c42\uff0c\u662f\u5927\u91cf\u7684\u6838\u5fc3\u5143\u4ef6\uff0c\u4f8b\u5982<\/span>\u6676\u4f53\u7ba1\u7684\u6e90\u6781\u3001\u6f0f\u6781\u548c\u6c9f\u9053\u7b49\u5173\u952e\u90e8\u5206\u3002<\/span><\/p>\n

\n

<\/section>\n

FinFET\u6676\u4f53\u7ba1\uff08\u9ccd\u5f0f\u6676\u4f53\u7ba1\uff09<\/span><\/p>\n

\n

\u6676\u4f53\u7ba1\u7684\u6805\u6781\uff0c\u4e3b\u8981\u91c7\u7528\u7684\u662f\u201c\u591a\u6676\u7845\u5c42\u201d\u3002\u56e0\u4e3a\u591a\u6676\u7845\u6750\u6599\u5177\u6709\u66f4\u597d\u7684\u5bfc\u7535\u6027\u548c\u7a33\u5b9a\u6027\uff0c\u9002\u5408\u63a7\u5236\u6676\u4f53\u7ba1\u7684\u5f00\u5173\u6001\u3002\u6676\u4f53\u7ba1\u7684\u6e90\u6781\u3001\u6f0f\u6781\u3001\u6805\u6781\u7684\u8fde\u63a5\u91d1\u5c5e\uff0c\u901a\u5e38\u662f\u94a8\u3002<\/span><\/p>\n

\n

\u518d\u5f80\u4e0a\uff0c\u6211\u4eec\u5c31\u9700\u8981\u6784\u5efa\u5927\u91cf\u7684\u9053\u8def\uff08\u7535\u8def\uff09\uff0c\u628a\u8fd9\u4e9b\u6676\u4f53\u7ba1\u8fde\u63a5\u8d77\u6765\uff0c\u7ec4\u6210\u590d\u6742\u7684\u529f\u80fd\u7535\u8def\u3002<\/span><\/p>\n

\n

\u505a\u8fd9\u4e2a\u8fde\u63a5\u7535\u8def\uff0c\u5f53\u7136\u662f\u91d1\u5c5e\u6bd4\u8f83\u5408\u9002\u3002\u6240\u4ee5\uff0c\u4e3b\u8981\u7528\u7684\u662f\u94dc\u7b49\u91d1\u5c5e\u6750\u6599\u3002\u6211\u4eec\u59d1\u4e14\u5c06\u8fd9\u5c42\uff0c\u53eb\u505a\u91d1\u5c5e\u4e92\u8fde\u5c42\u3002<\/span><\/p>\n

\n

<\/section>\n

\n

\u5168\u90fd\u662f\u91d1\u5c5e\uff0c\u5f53\u7136\u5bb9\u6613\u77ed\u8def\u3002\u6240\u4ee5\uff0c\u4e5f\u9700\u8981\u4e00\u4e9b\u7edd\u7f18\u5c42\uff08\u819c\uff09\uff0c\u628a\u7535\u8def\u9694\u79bb\u5f00\u3002<\/span><\/p>\n

\n

\u5728\u82af\u7247\u7684\u6700\u4e0a\u9762\uff0c\u4e00\u822c\u8fd8\u8981\u52a0\u4e00\u4e2a\u949d\u5316\u5c42\u3002\u949d\u5316\u5c42\u4e3b\u8981\u53d1\u6325\u4fdd\u62a4\u4f5c\u7528\uff0c<\/span>\u9632\u6b62\u5916\u754c\uff08\u5982\u6c34\u6c7d\u3001\u6742\u8d28\u7b49\uff09\u7684\u6c61\u67d3\u3001\u6c27\u5316\u548c\u673a\u68b0\u635f\u4f24\u3002<\/span><\/p>\n

\n

<\/section>\n

\n

\u90a3\u4e48\uff0c\u8fd9\u4e48\u591a\u5c42\uff0c\u5230\u5e95\u662f\u5982\u4f55\u642d\u5efa\u8d77\u6765\u7684\u5462\uff1f<\/span><\/p>\n

\n

\u7b54\u6848\u5c31\u662f<\/span>\u8584\u819c\u6c89\u79ef<\/span>\u3002<\/span><\/p>\n

\n

\u8fd9\u4e00\u5c42\u53c8\u4e00\u5c42\u7684\u67b6\u6784\uff0c\u5176\u5b9e\u5c31\u662f\u4e00\u5c42\u53c8\u4e00\u5c42\u7684\u8584\u819c\uff08\u539a\u5ea6\u5728\u6b21\u5fae\u7c73\u5230\u7eb3\u7c73\u7ea7\u4e4b\u95f4\uff09\u3002\u6709\u7684\u662f\u8584\u91d1\u5c5e\uff08\u5bfc\u7535\uff09\u819c\uff0c\u6709\u7684\u662f\u4ecb\u7535\uff08\u7edd\u7f18\uff09\u819c\u3002\u521b\u9020\u8fd9\u4e9b\u819c\u7684\u5de5\u827a\uff0c\u5c31\u662f\u6c89\u79ef\u3002<\/span><\/p>\n

\u6c89\u79ef\u5305\u62ec\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08CVD\uff09\u3001\u7269\u7406\u6c14\u76f8\u6c89\u79ef\uff08PVD\uff09\u548c\u539f\u5b50\u5c42\u6c89\u79ef\uff08ALD\uff09\u3002<\/span><\/p>\n

\u5316\u5b66\u6c14\u76f8\u6c89\u79ef (CVD) \u662f<\/span>\u901a\u8fc7\u5316\u5b66\u53cd\u5e94\uff0c\u751f\u6210\u56fa\u6001\u7269\u8d28\uff0c\u6c89\u79ef\u5230\u6676\u5706\u4e0a\uff0c\u5f62\u6210\u8584\u819c\u3002\u5b83\u5e38\u7528\u6765\u6c89\u79ef\u4e8c\u6c27\u5316\u7845\u3001\u6c2e\u5316\u7845\u7b49\u7edd\u7f18\u8584\u819c\uff08\u5c42\uff09\u3002<\/span><\/span><\/p>\n

\u00a0<\/span><\/p>\n

<\/section>\n

\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u793a\u4f8b<\/span><\/span><\/p>\n

\u00a0<\/span><\/p>\n

\u5316\u5b66\u6c14\u76f8\u6c89\u79ef (CVD) \u7684\u79cd\u7c7b\u975e\u5e38\u591a\u3002\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08PECVD\uff0c\u524d\u9762\u8bf4\u6c27\u5316\u7684\u65f6\u5019\uff0c\u4e5f\u63d0\u5230\u5b83\uff09\uff0c\u662f\u501f\u52a9\u7b49\u79bb\u5b50\u4f53\u4ea7\u751f\u53cd\u5e94\u6c14\u4f53\u7684\u4e00\u79cd\u5148\u8fdb\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u65b9\u6cd5\u3002<\/span><\/span><\/p>\n

\u00a0<\/span><\/p>\n

\u8fd9\u79cd\u65b9\u6cd5\u964d\u4f4e\u4e86\u53cd\u5e94\u6e29\u5ea6\uff0c\u56e0\u6b64\u975e\u5e38\u9002\u5408\u5bf9\u6e29\u5ea6\u654f\u611f\u7684\u7ed3\u6784\u3002\u4f7f\u7528\u7b49\u79bb\u5b50\u4f53\u8fd8\u53ef\u4ee5\u51cf\u5c11\u6c89\u79ef\u6b21\u6570\uff0c\u5f80\u5f80\u53ef\u4ee5\u5e26\u6765\u66f4\u9ad8\u8d28\u91cf\u7684\u8584\u819c\u3002<\/span><\/span><\/p>\n

\u7269\u7406\u6c14\u76f8\u6c89\u79ef (PVD) \u662f\u4e00\u79cd\u7269\u7406\u8fc7\u7a0b\u3002<\/span><\/p>\n

\n

\u5728\u771f\u7a7a\u73af\u5883\u4e2d\uff0c\u6c29\u79bb\u5b50\u88ab\u52a0\u901f\u649e\u51fb\u9776\u6750\uff0c\u5bfc\u81f4\u9776\u6750\u539f\u5b50\u88ab\u6e85\u5c04\u51fa\u6765\uff0c\u5e76\u4ee5\u96ea\u7247\u72b6\u6c89\u79ef\u5728\u6676\u5706\u8868\u9762\uff0c\u5f62\u6210\u8584\u819c\uff0c\u8fd9\u5c31\u662f\u7269\u7406\u6c14\u76f8\u6c89\u79ef\u3002<\/span>\u5b83\u5e38\u7528\u6765\u6c89\u79ef\u91d1\u5c5e\u8584\u819c\uff08\u5c42\uff09\uff0c\u5b9e\u73b0\u7535\u6c14\u8fde\u63a5\u3002<\/span><\/span><\/p>\n

\u00a0<\/span><\/p>\n

<\/section>\n
\u6e85\u5c04\u6c89\u79ef\u793a\u4f8b<\/span><\/section>\n

\u00a0<\/span><\/p>\n

\u901a\u8fc7\u8584\u819c\u6c89\u79ef\u6280\u672f\uff08\u5982PVD\u6e85\u5c04\u3001\u7535\u9540\uff09\u5f62\u6210\u91d1\u5c5e\u5c42\uff08\u5982\u94dc\u3001\u94dd\uff09\u7684\u8fc7\u7a0b\uff0c\u4e1a\u5185\u4e5f\u53eb\u505a<\/span>\u91d1\u5c5e\u5316<\/span>\uff0c\u6216\u8005\u91d1\u5c5e\u4e92\u8fde\u3002<\/span><\/p>\n

\u91d1\u5c5e\u4e92\u8fde\u5305\u62ec\u94dd\u4e92\u8054\u548c\u94dc\u4e92\u8fde\u3002\u94dc\u7684\u7535\u963b\u66f4\u4f4e\uff0c\u53ef\u9760\u6027\u66f4\u9ad8\uff08\u66f4\u80fd\u62b5\u6297\u7535\u8fc1\u79fb\uff09\uff0c\u6240\u4ee5\u73b0\u5728\u662f\u4e3b\u6d41\u9009\u62e9\u3002<\/span><\/p>\n

\u539f\u5b50\u5c42\u6c89\u79ef\uff08ALD\uff09\uff0c\u662f\u4e00\u79cd\u53ef\u4ee5\u5c06\u7269\u8d28\u4ee5\u5355\u539f\u5b50\u819c\u5f62\u5f0f\u4e00\u5c42\u4e00\u5c42\u7684\u9540\u5728\u57fa\u5e95\u8868\u9762\u7684\u65b9\u6cd5\uff0c\u548c\u666e\u901a\u5316\u5b66\u6c89\u79ef\u6709\u4e00\u4e9b\u76f8\u4f3c\u3002<\/span><\/p>\n

\u539f\u5b50\u5c42\u6c89\u79ef\u662f\u4ea4\u66ff\u6c89\u79ef\u3002\u5b83\u5148\u505a\u4e00\u6b21\u5316\u5b66\u6c89\u79ef\uff0c\u7136\u540e\u7528\u60f0\u6027\u6c14\u4f53\u51b2\u6389\u5269\u4f59\u6c14\u4f53\uff0c\u518d\u901a\u5165\u7b2c\u4e8c\u79cd\u6c14\u4f53\uff0c\u4e0e\u5438\u9644\u5728\u57fa\u4f53\u8868\u9762\u7684\u7b2c\u4e00\u79cd\u6c14\u4f53\u53d1\u751f\u5316\u5b66\u53cd\u5e94\u3002\u751f\u6210\u6d82\u5c42\u3002\u5982\u6b64\u53cd\u590d\uff0c\u6bcf\u6b21\u53cd\u5e94\u53ea\u6c89\u79ef\u4e00\u5c42\u539f\u5b50\u3002<\/span><\/span><\/p>\n

\u00a0<\/span><\/p>\n

<\/section>\n

\u00a0<\/span><\/p>\n

\u8fd9\u79cd\u65b9\u5f0f\u7684\u4f18\u70b9\u662f\u975e\u5e38\u7cbe\u786e\u3002\u5b83\u53ef\u4ee5\u901a\u8fc7\u63a7\u5236\u6c89\u79ef\u5468\u671f\u7684\u6b21\u6570\uff0c\u5b9e\u73b0\u8584\u819c\u539a\u5ea6\u7684\u7cbe\u786e\u63a7\u5236\u3002<\/span><\/span><\/p>\n

\u2588<\/span>\u00a0\u6e05\u6d17\u548c\u629b\u5149<\/span><\/p>\n

\u5728\u8fdb\u884c\u5149\u523b\u3001\u523b\u8680\u3001\u6c89\u79ef\u7b49\u5de5\u827a\u7684\u8fc7\u7a0b\u4e2d\uff0c\u9700\u8981\u53cd\u53cd\u590d\u590d\u5730\u8fdb\u884c\u6e05\u6d17\u548c\u629b\u5149\u3002<\/span><\/p>\n

\u6e05\u6d17\uff0c\u91c7\u7528\u7684\u662f\u9ad8\u7eaf\u5ea6\u5316\u5b66\u6eb6\u6db2\uff0c\u76ee\u7684\u662f\u79fb\u9664\u5176\u8868\u9762\u6b8b\u7559\u7684\u6742\u8d28\u548c\u6c61\u67d3\u7269\uff0c\u786e\u4fdd\u540e\u7eed\u5de5\u827a\u7684\u7eaf\u51c0\u5ea6\u3002<\/span><\/p>\n

\u629b\u5149\uff0c\u662f\u6d88\u9664\u6676\u5706\u8868\u9762\u7684\u8d77\u4f0f\u548c\u7f3a\u9677\uff0c\u63d0\u9ad8\u5149\u523b\u7684\u7cbe\u5ea6\u548c\u91d1\u5c5e\u4e92\u8054\u7684\u53ef\u9760\u6027\uff0c\u4ece\u800c\u5b9e\u73b0\u66f4\u9ad8\u5bc6\u5ea6\u66f4\u5c0f\u5c3a\u5bf8\u7684\u96c6\u6210\u7535\u8def\u8bbe\u8ba1\u548c\u5236\u9020\u3002<\/span><\/p>\n

\u4e0a\u671f\u4ecb\u7ecd\u6676\u5706\u5236\u5907\u7684\u65f6\u5019\uff0c\u6211\u4eec\u63d0\u5230\u8fc7CMP\uff08\u5316\u5b66\u673a\u68b0\u5e73\u5766\u5316\uff09\uff0c\u4e5f\u5c31\u662f\u91c7\u7528\u5316\u5b66\u8150\u8680\u3001\u673a\u68b0\u7814\u78e8\u76f8\u7ed3\u5408\u7684\u65b9\u5f0f\uff0c\u5bf9\u6676\u5706\u8868\u9762\u8fdb\u884c\u78e8\u629b\uff0c\u5b9e\u73b0\u8868\u9762\u5e73\u5766\u5316\u3002<\/span><\/span><\/p>\n

\u00a0<\/span><\/p>\n

\u5982\u679c\u6ca1\u6709CMP\u8fc7\u7a0b\uff0c\u8fd9\u4e2a\u5927\u53a6\u5c31\u662f\u4e00\u4e2a\u201c\u6b6a\u697c\u201d\u3002\u540e\u7eed\u5de5\u827a\u90fd\u6ca1\u529e\u6cd5\u8fdb\u884c\uff0c\u505a\u51fa\u6765\u7684\u82af\u7247\u4e5f\u65e0\u6cd5\u4fdd\u8bc1\u54c1\u8d28\u3002<\/span><\/span><\/p>\n

\u00a0<\/span><\/p>\n

<\/section>\n

\u56fe\u7247\u6765\u6e90\uff1a\u7f51\u7edc<\/span><\/span><\/p>\n

\u00a0<\/span><\/p>\n

\u00a0<\/span><\/p>\n

\u2588<\/span>\u00a0\u53cd\u590d\u5faa\u73af<\/span><\/p>\n

\u524d\u9762\u8bf4\u4e86\uff0c\u82af\u7247\u5305\u62ec\u51e0\u5341\u751a\u81f3\u4e0a\u767e\u5c42\u3002<\/span><\/p>\n

\n

\u4e8b\u5b9e\u4e0a\uff0c\u6bcf\u4e00\u5c42\u7684\u642d\u5efa\uff0c\u5176\u5b9e\u5c31\u662f\u5149\u523b\u3001\u8680\u523b\u3001\u6c89\u79ef\u3001\u6e05\u6d17\u3001CMP\u7684\u53cd\u590d\u5faa\u73af\u3002<\/span><\/p>\n

\n

\u5982\u4e0b\u9762\u7684gif\u52a8\u56fe\u6240\u793a\uff1a<\/span><\/p>\n

<\/section>\n

\"\"<\/p>\n

\u6162\u52a8\u4f5c\u5206\u89e3\uff1a<\/span><\/p>\n

\n

<\/section>\n
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<\/section>\n
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<\/section>\n
<\/section>\n
<\/section>\n
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<\/section>\n
\"\"<\/section>\n
<\/section>\n
<\/section>\n
<\/section>\n
<\/section>\n
<\/section>\n
<\/section>\n
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<\/section>\n
<\/section>\n

\n

\u5927\u5bb6\u90fd\u770b\u660e\u767d\u4e86\u6ca1\uff1f<\/span><\/p>\n

\u00a0<\/span><\/p>\n

\u7ecf\u8fc7N\u6b21\u7684\u53cd\u590d\u5faa\u73af\uff0c\u82af\u7247\u8fd9\u680b\u5927\u697c\uff0c\u7ec8\u4e8e\u201c\u5c01\u9876\u201d\u5566\u3002\u6492\u82b1\uff01\u6492\u82b1\uff01<\/span><\/p>\n

\n

<\/section>\n

\n

\u522b\u9ad8\u5174\u5f97\u592a\u65e9\uff01\u201c\u5c01\u9876\u201d\u4e4b\u540e\uff0c\u8fd8\u6709\u5f88\u591a\u201c\u5584\u540e\u201d\u5de5\u827a\u5462\uff01<\/span><\/p>\n

\u2588<\/span>\u00a0\u9488\u6d4b\uff08\u63a2\u9488\u6d4b\u8bd5\uff09<\/span><\/p>\n

\u7ecf\u8fc7\u524d\u9762\u7684\u5de5\u5e8f\u4e4b\u540e\uff0c\u6676\u5706\u4e0a\u5f62\u6210\u4e86\u4e00\u4e2a\u4e2a\u7684\u65b9\u5f62\u5c0f\u683c\uff0c\u4e5f\u5c31\u662f\u6676\u7c92\uff08Die\uff09\u3002<\/span><\/p>\n

\n

<\/section>\n

\n

\u201cDie\u201d\u8fd9\u4e2a\u8bcd\uff0c\u5927\u5bb6\u7b2c\u4e00\u6b21\u770b\u5230\u53ef\u80fd\u4f1a\u6bd4\u8f83\u60ca\u8bb6\uff0c\u8fd9\u4e0d\u662f\u201c\u6b7b\u201d\u7684\u610f\u601d\u561b\u3002<\/span><\/p>\n

\n

\u4f46\u5b9e\u9645\u4e0a\uff0c\u5b83\u548c\u201c\u6b7b\u201d\u6ca1\u5173\u7cfb\u3002\u8fd9\u4e2a\u201cDie\u201d\uff0c\u6e90\u81ea\u5fb7\u8bed\u201cDrahtzug\u201d\uff08\u62c9\u4e1d\u5de5\u827a\uff09\uff0c\u6216\u4e0e\u5207\u5272\u52a8\u4f5c\u201cDiced\u201d\u76f8\u5173\u3002\u4e5f\u6709\u8bf4\u6cd5\u79f0\uff0c\u65e9\u671f\u7684\u534a\u5bfc\u4f53\u5de5\u7a0b\u5e08\uff0c\u4f1a\u7528\u201cDie\u201d\u5f62\u5bb9\u6676\u5706\u4e0a\u5207\u5272\u51fa\u7684\u72ec\u7acb\u5355\u5143\uff0c\u5982\u540c\u786c\u5e01\u6a21\u5177\u3002<\/span><\/p>\n

\n

\u5927\u53a6\u5c01\u9876\uff0c\u7b2c\u4e00\u4ef6\u4e8b\u60c5\uff0c\u5f53\u7136\u662f\u6d4b\u8bd5\u3002<\/span><\/p>\n

\n

\u6d4b\u8bd5\u662f\u4e3a\u4e86\u68c0\u9a8c\u534a\u5bfc\u4f53\u82af\u7247\u7684\u8d28\u91cf\u662f\u5426\u8fbe\u5230\u6807\u51c6\u3002\u90a3\u4e9b\u6d4b\u8bd5\u4e0d\u5408\u683c\u7684\u6676\u7c92\uff0c\u4e0d\u4f1a\u8fdb\u5165\u5c01\u88c5\u6b65\u9aa4\uff0c\u6709\u52a9\u4e8e\u8282\u7701\u6210\u672c\u548c\u65f6\u95f4\u3002<\/span><\/p>\n

\n

\u7535\u5b50\u7ba1\u82af\u5206\u9009\uff08EDS<\/span>\uff09<\/span>\u662f\u4e00\u79cd\u9488\u5bf9\u6676\u5706\u7684\u6d4b\u8bd5\u65b9\u6cd5\uff0c\u901a\u5e38\u5206\u4e3a\u4e94\u6b65\uff0c\u5177\u4f53\u5982\u4e0b\uff1a<\/span><\/span><\/p>\n

\u7b2c\u4e00\u6b65\uff0c\u7535\u6c14\u53c2\u6570\u76d1\u63a7\uff08EPM<\/span>\uff09\u3002<\/span><\/span><\/p>\n

\n

EPM\u4f1a\u5bf9\u82af\u7247\u7684\u6bcf\u4e2a\u5668\u4ef6\uff08\u5305\u62ec\u6676\u4f53\u7ba1\u3001\u7535\u5bb9\u5668\u548c\u4e8c\u6781\u7ba1\uff09\u8fdb\u884c\u6d4b\u8bd5\uff0c\u786e\u4fdd\u5176\u7535\u6c14\u53c2\u6570\u8fbe\u6807\u3002EPM\u63d0\u4f9b\u7684\u7535\u6c14\u7279\u6027\u6570\u636e\u6d4b\u8bd5\u7ed3\u679c\uff0c\u5c06\u88ab\u7528\u4e8e\u6539\u5584\u5de5\u827a\u6548\u7387\u548c\u4ea7\u54c1\u6027\u80fd\uff08\u5e76\u975e\u68c0\u6d4b\u4e0d\u826f\u4ea7\u54c1\uff09\u3002<\/span><\/p>\n

\n

\u7b2c\u4e8c\u6b65\uff0c\u6676\u5706\u8001\u5316\u6d4b\u8bd5\u3002<\/span><\/p>\n

\n

\u5c06\u6676\u5706\u7f6e\u4e8e\u4e00\u5b9a\u7684\u6e29\u5ea6\u548c\u7535\u538b\u4e0b\u8fdb\u884c\u6d4b\u8bd5\uff0c\u53ef\u4ee5\u627e\u51fa\u90a3\u4e9b\u53ef\u80fd\u53d1\u751f\u65e9\u671f\u7f3a\u9677\u7684\u4ea7\u54c1\u3002<\/span><\/p>\n

\n

\u7b2c\u4e09\u6b65\uff0c\u9488\u6d4b\uff08Chip Probing\uff09\u3002<\/span><\/p>\n

\n

\u6b64\u65f6\u7684\u82af\u7247\uff0c\u56e0\u4e3a\u8fd8\u6ca1\u6709\u5207\u5272\u548c\u5c01\u88c5\uff0c\u5176\u7ba1\u811a\uff08\u6216\u79f0\u4e3a\u57ab\u7247\uff09\u662f\u76f4\u63a5\u66b4\u9732\u5728\u5916\u7684\u3002<\/span><\/span><\/p>\n

\u00a0<\/span><\/p>\n

\u6240\u4ee5\uff0c\u9488\u6d4b\uff0c\u5c31\u662f\u5229\u7528\u7cbe\u5bc6\u7684\u63a2\u9488\u53f0\u548c\u63a2\u9488\u5361\uff0c\u8fde\u63a5\u82af\u7247\u7ba1\u811a\u4e0e\u81ea\u52a8\u5316\u6d4b\u8bd5\u8bbe\u5907\uff08ATE\uff09\u3002<\/span><\/span><\/p>\n

\u00a0<\/span><\/p>\n

ATE\u4f1a\u65bd\u52a0\u9884\u5b9a\u7684\u6d4b\u8bd5\u4fe1\u53f7\uff0c\u68c0\u67e5\u82af\u7247\u662f\u5426\u7b26\u5408\u9884\u8bbe\u7684\u6027\u80fd\u6807\u51c6\uff0c\u5982\u5de5\u4f5c\u7535\u538b\u3001\u7535\u6d41\u6d88\u8017\u3001\u4fe1\u53f7\u65f6\u5e8f\u4ee5\u53ca\u7279\u5b9a\u529f\u80fd\u7684\u6b63\u786e\u6267\u884c\u3002\u9488\u6d4b\u8fd8\u53ef\u4ee5\u8fdb\u884c\u7535\u6027\u6d4b\u8bd5\uff08\u68c0\u6d4b\u77ed\u8def\u3001\u65ad\u8def\u3001\u6f0f\u7535\u7b49\u7f3a\u9677<\/span><\/span>\uff09\uff0c\u4ee5\u53ca\u6e29\u5ea6\u3001\u901f\u5ea6\u548c\u8fd0\u52a8\u6d4b\u8bd5\u3002<\/span><\/span><\/p>\n

\u00a0<\/span><\/p>\n

<\/section>\n

\u00a0<\/span><\/p>\n

\u7b2c\u56db\u6b65\uff0c\u4fee\u8865\u3002<\/span><\/p>\n

\n

\u6ca1\u9519\uff0c\u6709\u4e9b\u4e0d\u826f\u82af\u7247\u662f\u53ef\u4ee5\u4fee\u590d\u7684\uff0c\u53ea\u9700\u66ff\u6362\u6389\u5176\u4e2d\u5b58\u5728\u95ee\u9898\u7684\u5143\u4ef6\u5373\u53ef\u3002<\/span><\/p>\n

\n

\u7b2c\u4e94\u6b65\uff0c\u70b9\u58a8\u3002<\/span><\/p>\n

\u672a\u80fd\u901a\u8fc7\u6d4b\u8bd5\u7684\u6676\u7c92\uff0c\u9700\u8981\u52a0\u4e0a\u6807\u8bb0\u3002\u8fc7\u53bb\uff0c\u6211\u4eec\u9700\u8981\u7528\u7279\u6b8a\u58a8\u6c34\u6807\u8bb0\u6709\u7f3a\u9677\u7684\u82af\u7247\uff0c\u4fdd\u8bc1\u5b83\u4eec\u7528\u8089\u773c\u5373\u53ef\u8bc6\u522b\u3002\u5982\u4eca\uff0c\u7531\u7cfb\u7edf\u6839\u636e\u6d4b\u8bd5\u6570\u636e\u503c\uff0c\u81ea\u52a8\u8fdb\u884c\u5206\u62e3\u3002<\/span><\/span><\/p>\n

\u6d4b\u8bd5\u4e4b\u540e\uff0c\u82af\u7247\u5236\u9020\u7684\u524d\u9053\u5de5\u827a\uff0c\u5c31\u5168\u90e8\u5b8c\u6210\u5566\u3002\u80fd\u575a\u6301\u770b\u5230\u8fd9\u91cc\u7684\uff0c\u90fd\u662f\u771f\u7231\u554a\uff01<\/span><\/p>\n

\u603b\u7ed3\u4e00\u4e0b\u6574\u4e2a\u8fc7\u7a0b\uff0c\u5982\u4e0b\u56fe\u6240\u793a\uff1a<\/span><\/p>\n

<\/p>\n

\u4e0b\u4e00\u671f\uff0c\u6211\u4eec\u5c31\u8981\u4ecb\u7ecd\u540e\u9053\u5de5\u827a\u3002\u4e5f\u5c31\u662f\u5982\u4f55\u628a\u82af\u7247\u7ed9\u5207\u5272\u4e0b\u6765\uff0c\u8fdb\u884c\u5c01\u88c5\u548c\u6d4b\u8bd5\uff0c\u5e76\u6700\u7ec8\u53d1\u8d27\u51fa\u53bb\u3002<\/span><\/p>\n

\u656c\u8bf7\u671f\u5f85\uff01<\/span><\/p>\n

\u53c2\u8003\u6587\u732e\uff1a<\/span><\/p>\n

1\u3001\u300a<\/span>\u82af\u7247\u5230\u5e95\u662f\u5982\u4f55\u5236\u9020\u51fa\u6765\u7684\uff1f\u300b\uff0c\u65b0\u77f3\u5668\u516c\u56ed\uff0cB\u7ad9\uff1b<\/span><\/p>\n

2\u3001\u300a<\/span>\u8d85\u7ea7\u957f\u6587\u89e3\u6790\u82af\u7247\u5236\u9020\u5168\u6d41\u7a0b\u300b\uff0c\u80e1\u8bf4\u6f2b\u6f2b\u8c08\uff0cB\u7ad9\uff1b<\/span><\/p>\n

3\u3001\u300a\u7528\u6c99\u5b50\u9020\u82af\u7247\u300b\uff0c\u8c08\u4e09\u5708\uff0cB\u7ad9\uff1b<\/span><\/p>\n

4\u3001\u300a<\/span>\u82af\u7247\u5236\u9020\u5de5\u827a\u6d41\u7a0b.\u56fe\u6587\u8be6\u89e3\u300b\uff0cSemika\uff1b<\/span><\/p>\n

5\u3001\u300a<\/span>\u82af\u7247\u5236\u9020\u6d41\u7a0b\u8be6\u89e3\u300b\uff0c\u534a\u5bfc\u4f53\u884c\u4e1a\u89c2\u5bdf\uff1b<\/span><\/p>\n

6\u3001\u300a<\/span>\u5173\u4e8e\u534a\u5bfc\u4f53\u5236\u9020\u8fc7\u7a0b\u7684\u6b65\u9aa4\u3001\u6280\u672f\u548c\u6d41\u7a0b\u7684\u8be6\u89e3\u300b\uff0c\u7231\u5728\u4e03\u5915\u65f6\uff0c\u77e5\u4e4e\uff1b<\/span><\/p>\n

7\u3001\u300a<\/span>\u4e00\u6587\u8bfb\u61c2\u82af\u7247\u751f\u4ea7\u5168\u8fc7\u7a0b\u300b\uff0c\u82af\u7247\u534a\u5bfc\u4f53\uff1b<\/span><\/p>\n

8\u3001\u300a<\/span>\u82af\u7247\u5236\u9020\u768410\u4e2a\u5173\u952e\u6b65\u9aa4\u300b\uff0c\u4e2d\u5236\u667a\u5e93\uff1b<\/span><\/p>\n

9\u3001\u300a<\/span>\u534a\u5bfc\u4f53\u4ea7\u54c1\u5236\u9020\u7684\u516b\u4e2a\u6b65\u9aa4\u300b\uff0cLam Research\uff1b<\/span><\/p>\n

10\u3001<\/span>\u300a<\/span>\u534a\u5bfc\u4f53\u5236\u9020\u8fc7\u7a0b\u7684\u6b65\u9aa4\u3001\u6280\u672f\u3001\u6d41\u7a0b\u56fe\u300b\uff0c\u5317\u6e2f\u5357\u5df7\uff0c\u8f66\u89c4\u534a\u5bfc\u4f53\u786c\u4ef6\uff0c\u77e5\u4e4e\uff1b<\/span><\/p>\n

11\u3001\u300a\u4e00\u6587\u8bfb\u61c2\u82af\u7247\u751f\u4ea7\u6d41\u7a0b\u300b\uff0cEleanor\u7f8a\u6bdb\u886b\uff1b<\/span><\/p>\n

12\u3001\u300a<\/span>\u4e00\u9897\u82af\u7247\u7684\u8bde\u751f\u300b\uff0c\u79d1\u6280\u670b\u514bRoy\uff1b<\/span><\/p>\n

13\u3001\u300a\u82af\u7247\u5236\u9020\u5168\u6d41\u7a0b<\/span>\u300b\uff0c\u5468\u4f73\uff0c\u82af\u52a9\u624b\uff1b<\/span><\/span><\/p>\n

14\u3001\u300a\u534a\u5bfc\u4f53\u5236\u9020\u6280\u672f\u300b\uff0c<\/span><\/span>\u5938\u514b\u3001\u745f\u8fbe\u3001\u97e9\u90d1\u751f\uff0c\u7535\u5b50\u5de5\u4e1a\u51fa\u7248\u793e\uff1b<\/span><\/p>\n

15\u3001\u300a\u56fe\u89e3\u5165\u95e8\uff1a\u534a\u5bfc\u4f53\u5236\u9020\u300b\uff0c<\/span>\u4f50\u85e4\u6df3\u4e00\u3001\u738b\u5fc6\u6587\u3001\u738b\u59dd\u5a05\uff0c\u673a\u68b0\u5de5\u4e1a\u51fa\u7248\u793e\uff1b<\/span><\/p>\n

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