{"id":2656,"date":"2025-04-21T13:47:46","date_gmt":"2025-04-21T05:47:46","guid":{"rendered":"http:\/\/www.xzclass.com\/?p=2656"},"modified":"2025-05-30T10:58:24","modified_gmt":"2025-05-30T02:58:24","slug":"%e6%99%b6%e5%9c%86%e6%98%af%e5%a6%82%e4%bd%95%e5%88%b6%e9%80%a0%e5%87%ba%e6%9d%a5%e7%9a%84%ef%bc%9f","status":"publish","type":"post","link":"http:\/\/www.xzclass.com\/?p=2656","title":{"rendered":"\u6676\u5706\u662f\u5982\u4f55\u5236\u9020\u51fa\u6765\u7684\uff1f"},"content":{"rendered":"

\u82af\u7247\uff0c\u662f\u4eba\u7c7b\u79d1\u6280\u7684\u7cbe\u534e\uff0c\u4e5f\u88ab\u79f0\u4e3a\u73b0\u4ee3\u5de5\u4e1a\u7687\u51a0\u4e0a\u7684\u660e\u73e0\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u82af\u7247\u7684\u57fa\u672c\u7ec4\u6210\u662f\u6676\u4f53\u7ba1\u3002\u6676\u4f53\u7ba1\u7684\u57fa\u672c\u5de5\u4f5c\u539f\u7406\u5176\u5b9e\u5e76\u4e0d\u590d\u6742\uff0c\u4f46\u5728\u6307\u7532\u76d6\u90a3\u4e48\u5c0f\u7684\u9762\u79ef\u91cc\uff0c\u585e\u5165\u6570\u4ee5\u767e\u4ebf\u7ea7\u7684\u6676\u4f53\u7ba1\uff0c\u5c31\u8ba9\u8fd9\u4ef6\u4e8b\u60c5\u4e0d\u518d\u7b80\u5355\uff0c\u751a\u81f3\u7b97\u5f97\u4e0a\u662f\u4eba\u7c7b\u6709\u53f2\u4ee5\u6765\u6700\u590d\u6742\u7684\u5de5\u7a0b\uff0c\u6ca1\u6709\u4e4b\u4e00\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

<\/section>\n


<\/span><\/p>\n

\u63a5\u4e0b\u6765\u8fd9\u6bb5\u65f6\u95f4\uff0c\u5c0f\u67a3\u541b\u4f1a\u901a\u8fc7\u4e00\u7cfb\u5217\u6587\u7ae0\uff0c\u4e13\u95e8\u4ecb\u7ecd\u82af\u7247\u7684\u5236\u9020\u6d41\u7a0b\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u4eca\u5929\u8fd9\u7bc7\uff0c\u5148\u8bb2\u8bb2<\/span>\u6676\u5706\u5236\u9020<\/span>\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n


<\/span><\/p>\n

\u2588<\/span> \u4e3b\u8981\u9636\u6bb5\u548c\u5206\u5de5<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u4ecb\u7ecd\u6676\u5706\u4e4b\u524d\uff0c\u5c0f\u67a3\u541b\u5148\u4ecb\u7ecd\u4e00\u4e0b\u82af\u7247\u5236\u9020\u7684\u4e00\u4e9b\u80cc\u666f\u77e5\u8bc6\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u82af\u7247\u7684\u5236\u9020\uff0c\u9700\u8981\u7ecf\u8fc7\u6570\u767e\u9053\u5de5\u5e8f\u3002\u6211\u4eec\u53ef\u4ee5\u5148\u5c06\u5176\u5f52\u7eb3\u4e3a\u56db\u4e2a\u4e3b\u8981\u9636\u6bb5\u2014\u2014\u82af\u7247\u8bbe\u8ba1\u3001\u6676\u5706\u5236\u5907\u3001\u82af\u7247\u5236\u9020\uff08\u524d\u9053<\/span><\/span>\uff09\u3001\u5c01\u88c5\u6d4b\u8bd5\uff08\u540e\u9053<\/span><\/span>\uff09\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

<\/section>\n


<\/span><\/p>\n

\u6211\u4eec\u7ecf\u5e38\u4f1a\u542c\u8bf4Fabless\u3001Foundry\u3001IDM\u7b49\u540d\u8bcd\u3002\u8fd9\u4e9b\u540d\u8bcd\uff0c\u548c\u82af\u7247\u884c\u4e1a\u7684\u5206\u5de5\u6709\u5bc6\u5207\u5173\u7cfb\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u901a\u5e38\u6765\u8bf4\uff0c\u884c\u4e1a\u91cc\u6709\u4e9b\u4f01\u4e1a\uff0c\u53ea\u4e13\u6ce8\u4e8e\u82af\u7247\u7684\u8bbe\u8ba1\u3002\u82af\u7247\u7684\u5236\u9020\u3001\u5c01\u88c5\u548c\u6d4b\u8bd5\uff0c\u90fd\u4e0d\u505a\u3002\u8fd9\u4e9b\u4f01\u4e1a\uff0c\u5c31\u5c5e\u4e8eFabless\u4f01\u4e1a\uff0c\u4f8b\u5982\u9ad8\u901a\u3001\u82f1\u4f1f\u8fbe\u3001\u8054\u53d1\u79d1\u3001\uff08\u4ee5\u524d\u7684<\/span><\/span>\uff09\u534e\u4e3a\u7b49\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u4e5f\u6709\u4e9b\u4f01\u4e1a\uff0c\u4e13\u95e8\u8d1f\u8d23\u751f\u4ea7\u82af\u7247\uff0c\u6ca1\u6709\u81ea\u5df1\u54c1\u724c\u7684\u82af\u7247\u3002\u8fd9\u4e9b\u4f01\u4e1a\uff0c\u5c31\u5c5e\u4e8eFoundry\uff0c\u6676\u5706\u4ee3\u5de5\u5382\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u6700\u8457\u540d\u7684Foundry\uff0c\u5f53\u7136\u662f\u6211\u56fd\u53f0\u6e7e\u7701\u7684\u53f0\u79ef\u7535\u3002\u4e2d\u82af\u56fd\u9645\uff08SMIC\uff09\u3001\u8054\u534e\u7535\u5b50\uff08UMC\uff09\u3001\u534e\u8679\u96c6\u56e2\u7b49\uff0c\u4e5f\u5c5e\u4e8eFoundry\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

<\/section>\n

\u53f0\u79ef\u7535<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u82af\u7247\u5236\u9020\u7684\u96be\u5ea6\u6bd4\u82af\u7247\u8bbe\u8ba1\u8fd8\u9ad8\u3002\u6211\u4eec\u56fd\u5185\u5f88\u591a\u4f01\u4e1a\u90fd\u5177\u5907\u5148\u8fdb\u5236\u7a0b\u82af\u7247\u7684\u8bbe\u8ba1\u80fd\u529b\uff0c\u4f46\u627e\u4e0d\u5230Foundry\u628a\u82af\u7247\u9020\u51fa\u6765\u3002\u6240\u4ee5\uff0c\u901a\u5e38\u8bf4\u7684\u201c\u5361\u8116\u5b50\u201d\uff0c\u5c31\u662f\u6307\u7684\u82af\u7247\u5236\u9020\u8fd9\u4e2a\u73af\u8282\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

Foundry\u751f\u4ea7\u51fa\u6765\u7684\u82af\u7247\uff0c\u4e00\u822c\u53eb\u88f8\u7247\u3002\u88f8\u7247\u662f\u6ca1\u6cd5\u76f4\u63a5\u7528\u7684\uff0c\u9700\u8981\u7ecf\u8fc7\u5c01\u88c5\u3001\u6d4b\u8bd5\u7b49\u73af\u8282\u3002\u4e13\u95e8\u505a\u5c01\u88c5\u548c\u6d4b\u8bd5\u7684\u5382\u5bb6\uff0c\u5c31\u662fOSAT\uff08Outsourced Semiconductor Assembly and Test\uff0c\u5916\u5305\u534a\u5bfc\u4f53\u5c01\u88c5\u4e0e\u6d4b\u8bd5\uff09\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u5f53\u7136\uff0c\u6709\u7684\u6676\u5706\u5382\u81ea\u5df1\u4e5f\u6709\u81ea\u5df1\u7684\u5c01\u6d4b\u5382\uff0c\u4f46\u901a\u5e38\u4e0d\u5982OSAT\u7075\u6d3b\u597d\u7528\u3002\u4e1a\u754c\u6bd4\u8f83\u77e5\u540d\u7684OSAT\u73a9\u5bb6\u6709\uff1a\u65e5\u6708\u5149\uff08ASE\uff09\u3001\u957f\u7535\u79d1\u6280\u3001\u8054\u5408\u79d1\u6280\uff08UTAC\uff09\u3001Amkor\u7b49\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u6700\u540e\u5c31\u662fIDM\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

IDM\u662fIntegrated Device Manufacturer\uff08\u6574\u5408\u5143\u4ef6\u5236\u9020\u5546\uff09\u7684\u7b80\u79f0\u3002\u6709\u4e9b\u516c\u53f8\uff0c\u65e2\u505a\u82af\u7247\u8bbe\u8ba1\uff0c\u53c8\u505a\u6676\u5706\u751f\u4ea7\uff0c\u8fd8\u505a\u5c01\u6d4b\uff0c\u7aef\u5230\u7aef\u5168\u90e8\u90fd\u505a\u3002\u8fd9\u79cd\u4f01\u4e1a\uff0c\u5c31\u53eb\u505aIDM\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

<\/section>\n


<\/span><\/p>\n

\u5168\u7403\u5177\u5907\u8fd9\u79cd\u80fd\u529b\u7684\u4f01\u4e1a\uff0c\u4e0d\u662f\u592a\u591a\uff0c\u5305\u62ec\u82f1\u7279\u5c14\u3001\u4e09\u661f\u3001\u5fb7\u5dde\u4eea\u5668\u3001\u610f\u6cd5\u534a\u5bfc\u4f53\u7b49\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

IDM\u770b\u4e0a\u53bb\u5f88\u5389\u5bb3\uff0c\u4ec0\u4e48\u90fd\u80fd\u5e72\u3002\u4f46\u5b9e\u9645\u4e0a\uff0c\u82af\u7247\u8fd9\u4e2a\u4ea7\u4e1a\u8fc7\u4e8e\u5e9e\u5927\uff0c\u7cbe\u7ec6\u5316\u5206\u5de5\u662f\u5927\u52bf\u6240\u8d8b\u3002Fabless+Foundry\u6a21\u5f0f\uff0c\u672f\u4e1a\u6709\u4e13\u653b\uff0c\u5728\u4e13\u4e1a\u6027\u3001\u6548\u7387\u548c\u6536\u76ca\u65b9\u9762\uff0c\u90fd\u66f4\u6709\u4f18\u52bf\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

AMD\u66fe\u7ecf\u4e5f\u662fIDM\uff0c\u4f46\u540e\u6765\u6539\u5f26\u66f4\u5f20\uff0c\u4e5f\u8d70\u8f7b\u8d44\u4ea7\u7684Fabless\u6a21\u5f0f\u4e86\u3002\u5b83\u7684\u6676\u5706\u5382\u88ab\u5265\u79bb\u51fa\u53bb\u540e\uff0c\u6447\u8eab\u4e00\u53d8\uff0c\u6210\u4e86\u5168\u7403\u524d\u4e94\u7684\u6676\u5706\u4ee3\u5de5\u5382\uff1a\u683c\u7f57\u65b9\u5fb7\uff08GlobalFoundries\uff09\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n


<\/span><\/p>\n

\u2588<\/span> \u6676\u5706\u5236\u5907<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u597d\u4e86\uff0c\u63a5\u4e0b\u6765\uff0c\u6211\u4eec\u6765\u770b\u5177\u4f53\u7684\u5236\u9020\u8fc7\u7a0b\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u9996\u5148\uff0c\u8fd8\u662f\u4ece\u6700\u57fa\u672c\u7684\u6676\u5706\u5236\u5907\u8bf4\u8d77\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

<\/section>\n

\u8fd9\u4e2a\uff0c\u5c31\u662f\u6676\u5706<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u6211\u4eec\u7ecf\u5e38\u8bf4\uff0c\u82af\u7247\u662f\u6c99\u5b50\u9020\u7684\u3002\u5176\u5b9e\uff0c\u4e3b\u8981\u662f\u56e0\u4e3a\u6c99\u5b50\u91cc\u9762\uff0c\u542b\u6709\u5927\u91cf\u7684\u7845\uff08Si\uff09\u5143\u7d20\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

<\/section>\n

\u7845\u662f\u5730\u58f3\u5185\u7b2c\u4e8c\u4e30\u5bcc\u7684\u5143\u7d20\uff0c\u4ec5\u6b21\u4e8e\u6c27<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u6c99\u5b50\u91cc\u6709\u7845\uff0c\u4f46\u662f\u7eaf\u5ea6\u5f88\u4f4e\uff0c\u800c\u4e14\u662f\u4e8c\u6c27\u5316\u7845\uff08SiO2\uff09\u3002\u6211\u4eec\u4e0d\u80fd\u968f\u4fbf\u6293\u4e00\u628a\u6c99\u5b50\u5c31\u62ff\u6765\u63d0\u70bc\u7845\u3002\u901a\u5e38\uff0c\u4f1a\u9009\u7528\u542b\u7845\u91cf\u6bd4\u8f83\u9ad8\u7684\u77f3\u82f1\u7802\u77ff\u77f3\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

<\/section>\n

\u9ad8\u7eaf\u77f3\u82f1\u7802\u77ff\u77f3<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u7b2c\u4e00\u6b65\uff0c\u8131\u6c27\u3001\u63d0\u7eaf\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u5c06\u77f3\u82f1\u7802\u539f\u6599\u653e\u5165\u7194\u7089\u4e2d\uff0c\u52a0\u70ed\u52301400\u2103\u4ee5\u4e0a\u7684\u9ad8\u6e29\uff08\u7845\u7684\u7194\u70b9\u4e3a1410\u2103\uff09\uff0c\u4e0e\u78b3\u6e90\u53d1\u751f\u5316\u5b66\u53cd\u5e94\uff0c\u5c31\u53ef\u4ee5\u751f\u6210\u9ad8\u7eaf\u5ea6\uff0898%\u4ee5\u4e0a\uff09\u7684\u51b6\u91d1\u7ea7\u5de5\u4e1a\u7845\uff08MG-Si\uff09\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

<\/section>\n

\u51b6\u91d1\u7ea7\u5de5\u4e1a\u7845<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u968f\u540e\uff0c\u901a\u8fc7\u6c2f\u5316\u53cd\u5e94\u548c\u84b8\u998f\u5de5\u827a\uff0c\u8fdb\u4e00\u6b65\u63d0\u7eaf\uff0c\u5f97\u5230\u7eaf\u5ea6\u66f4\u9ad8\u7684\u7845\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u7845\u8fd9\u4e2a\u6750\u6599\uff0c\u4e0d\u4ec5\u53ef\u4ee5\u7528\u4e8e\u534a\u5bfc\u4f53\u82af\u7247\u5236\u9020\uff0c\u4e5f\u53ef\u4ee5\u7528\u4e8e\u5149\u4f0f\u884c\u4e1a\uff08\u592a\u9633\u80fd\u53d1\u7535\uff09\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u5728\u5149\u4f0f\u884c\u4e1a\uff0c\u5bf9\u7845\u7684\u7eaf\u5ea6\u8981\u6c42\u662f99.9999%\u523099.999999%\uff0c\u4e5f\u5c31\u662f4~6\u4e2a9\uff0c\u53eb\uff08SG-Si\uff09\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

<\/span><\/section>\n
<\/section>\n

\u5149\u4f0f\u677f<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u5728\u534a\u5bfc\u4f53\u82af\u7247\u884c\u4e1a\uff0c\u5bf9\u7845\u7684\u7eaf\u5ea6\u8981\u6c42\u66f4\u52a0\u53d8\u6001\uff0c\u662f99.9999999%\u523099.999999999%\uff0c\u4e5f\u5c31\u662f9~11\u4e2a9\u3002\u8fd9\u79cd\u7528\u4e8e\u534a\u5bfc\u4f53\u5236\u9020\u7684\u7845\uff0c\u5b66\u540d\u7535\u5b50\u7ea7\u7845\uff08EG-Si\uff09\uff0c\u5e73\u5747\u6bcf\u4e00\u767e\u4e07\u4e2a\u7845\u539f\u5b50\u4e2d\u6700\u591a\u53ea\u5141\u8bb8\u6709\u4e00\u4e2a\u6742\u8d28\u539f\u5b50\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u7b2c\u4e8c\u6b65\uff0c\u62c9\u5355\u6676\u7845\uff08\u94f8\u952d\uff09<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u8fd9\u79cd\u7ecf\u8fc7\u63d0\u7eaf\u4e4b\u540e\u7684\u7845\uff0c\u662f\u591a\u6676\u7845\u3002\u63a5\u4e0b\u6765\uff0c\u8fd8\u9700\u8981\u628a\u5b83\u53d8\u6210\u5355\u6676\u7845\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u4e4b\u524d\u4ecb\u7ecd\u534a\u5bfc\u4f53\u53d1\u5c55\u7b80\u53f2\u7684\u65f6\u5019\uff0c\u5c0f\u67a3\u541b\u7ed9\u5927\u5bb6\u89e3\u91ca\u8fc7\u5355\u6676\u7845\u548c\u591a\u6676\u7845\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u7b80\u5355\u6765\u8bf4\uff0c\u5355\u6676\u7845\u5177\u6709\u5b8c\u7f8e\u7684\u6676\u4f53\u7ed3\u6784\uff0c\u6709\u975e\u5e38\u597d\u7684\u6027\u80fd\u3002\u591a\u6676\u7845\uff0c\u6676\u7c92\u5927\u3001\u4e0d\u89c4\u5219\u3001\u7f3a\u9677\u591a\uff0c\u5404\u79cd\u6027\u80fd\u90fd\u76f8\u5bf9\u5dee\u3002\u6240\u4ee5\uff0c\u82af\u7247\u8fd9\u79cd\u9ad8\u7aef\u8d27\uff0c\u57fa\u672c\u90fd\u4f7f\u7528\u5355\u6676\u7845\u3002\u5149\u4f0f\u90a3\u8fb9\uff0c\u53ef\u4ee5\u7528\u591a\u6676\u7845\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

<\/section>\n


<\/span><\/p>\n

\u5c06\u591a\u6676\u7845\u53d8\u6210\u5355\u6676\u7845\uff0c\u76ee\u524d\u4e3b\u6d41\u7684\u5236\u6cd5\uff0c\u662f\u67f4\u514b\u62c9\u592b\u65af\u57fa\u6cd5\uff08\u4e5f\u5c31\u662f\u76f4\u62c9\u6cd5\uff09\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u9996\u5148\uff0c\u52a0\u70ed\u7194\u5316\u9ad8\u7eaf\u5ea6\u591a\u6676\u7845\uff0c\u5f62\u6210\u6db2\u6001\u7684\u7845\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

<\/section>\n

\u89c4\u6a21\u5e9e\u5927\u7684\u5355\u6676\u7194\u7089<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u7136\u540e\uff0c\u5c06\u4e00\u6761\u7ec6\u5c0f\u7684\u5355\u6676\u7845\u4f5c\u4e3a\u5f15\u5b50\uff08\u4e5f\u53eb\u505a\u7845\u79cd\u3001\u7c7d\u6676\uff09\uff0c\u4f38\u5165\u7845\u6eb6\u6db2\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u63a5\u7740\uff0c\u7f13\u6162\u5730\u5411\u4e0a\u65cb\u8f6c\u63d0\u62c9\u3002\u88ab\u62c9\u51fa\u7684\u7845\u6eb6\u6db2\uff0c\u56e0\u4e3a\u6e29\u5ea6\u68af\u5ea6\u4e0b\u964d\uff0c\u4f1a\u51dd\u56fa\u6210\u56fa\u6001\u7845\u67f1\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

<\/section>\n

<\/span><\/section>\n

\u5728\u7845\u79cd\u7684\u5e26\u9886\u4e0b\uff0c\u79bb\u5f00\u6db2\u9762\u7684\u7845\u539f\u5b50\u51dd\u56fa\u540e\u90fd\u662f\u201c\u6392\u7740\u961f\u201d\u7684\uff0c\u4e5f\u5c31\u53d8\u6210\u4e86\u6392\u5217\u6574\u9f50\u7684\u5355\u6676\u7845\u67f1\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\uff08\u6ce8\u610f\uff0c\u62c9\u7684\u901f\u5ea6\u4e0d\u592a\u4e00\u6837\u3002\u6700\u5f00\u59cb\uff0c\u662f\u4ee56mm\/\u5206\u949f\u7684\u901f\u5ea6\uff0c\u62c9\u51fa10cm\u5de6\u53f3\u7684\u56fa\u6001\u7845\u67f1\u3002\u8fd9\u4e3b\u8981\u662f\u56e0\u4e3a\uff0c\u6676\u4f53\u521a\u521a\u5f62\u6210\u65f6\uff0c\u4f1a\u56e0\u4e3a\u70ed\u51b2\u51fb\uff0c\u6676\u76f8\u4e0d\u7a33\u5b9a\uff0c\u5bb9\u6613\u4ea7\u751f\u6676\u4f53\u7f3a\u9677\u3002\u62c9\u51fa10cm\u957f\u5ea6\u4e4b\u540e\uff0c\u5c31\u53ef\u4ee5\u51cf\u901f\u4e86\uff0c\u53d8\u6210\u7f13\u6162\u63d0\u62c9\u3002<\/span><\/span>\uff09<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u65cb\u8f6c\u62c9\u8d77\u7684\u901f\u5ea6\u4ee5\u53ca\u6e29\u5ea6\u7684\u63a7\u5236\uff0c\u5bf9\u6676\u67f1\u54c1\u8d28\u6709\u5f88\u5927\u7684\u5f71\u54cd\u3002\u7845\u67f1\u5c3a\u5bf8\u6108\u5927\u65f6\uff0c\u62c9\u6676\u5bf9\u901f\u5ea6\u4e0e\u6e29\u5ea6\u7684\u8981\u6c42\u5c31\u66f4\u9ad8\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

<\/section>\n


<\/span><\/p>\n

\u6700\u540e\uff0c\u4f1a\u62c9\u51fa\u4e00\u6839\u76f4\u5f84\u901a\u5e38\u4e3a30\u5398\u7c73\uff0c\u957f\u5ea6\u7ea61-1.5\u7c73\u7684\u5706\u67f1\u5f62\u7845\u67f1\u3002\u8fd9\u4e2a\u7845\u67f1\uff0c\u5c31\u662f\u6676\u68d2\uff0c\u4e5f\u53eb\u505a\u7845\u952d\uff08\u5475\u5475\uff0c\u548c\u201c\u9f9f\u815a\u201d\u3001\u201c\u89c4\u5b9a\u201d\u540c\u97f3\uff09\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

<\/span><\/p>\n


<\/span><\/p>\n

\u7b2c\u4e09\u6b65\uff0c\u6676\u5706\u5207\u5272\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u62c9\u51fa\u6765\u7684\u7845\u952d\uff0c\u8981\u622a\u53bb\u5934\u548c\u5c3e\uff0c\u7136\u540e\u5207\u6210\u4e00\u7247\u7247\u7279\u5b9a\u539a\u5ea6\u7684\u8584\u7247\uff08<\/span><\/span>\u7845\u7247\uff09\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u76ee\u524d\u4e3b\u6d41\u7684\u5207\u7247\u65b9\u5f0f\uff0c\u662f\u91c7\u7528\u5e26\u6709\u91d1\u521a\u7ebf\u7684\u591a\u7ebf\u5207\u5272\u673a\uff0c\u4e5f\u5c31\u662f\u7528\u7ebf\u4e0a\u56fa\u5b9a\u6709\u91d1\u521a\u77f3\u9897\u7c92\u7684\u94a2\u4e1d\u7ebf\uff0c\u5bf9\u7845\u6bb5\u8fdb\u884c\u591a\u6bb5\u5207\u5272\u3002\u8fd9\u79cd\u65b9\u6cd5\u7684\u6548\u7387\u9ad8\u3001\u635f\u8017\u5c11\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

<\/section>\n
\u91d1\u521a\u7ebf\u952f<\/span><\/span><\/section>\n


<\/span><\/p>\n

\u5207\u7247\u6709\u65f6\u5019\u4e5f\u4f1a\u91c7\u7528\u5185\u5706\u952f\u3002\u5185\u5706\u952f\u5219\u662f\u5185\u5706\u9540\u6709\u91d1\u521a\u77f3\u7684\u8584\u7247\uff0c\u901a\u8fc7\u65cb\u8f6c\u5185\u5706\u8584\u7247\u5207\u5272\u6676\u952d\u3002\u5185\u5706\u952f\u7684\u5207\u5272\u7cbe\u5ea6\u548c\u901f\u5ea6\u76f8\u5bf9\u8f83\u9ad8\uff0c\u9002\u7528\u4e8e\u9ad8\u8d28\u91cf\u6676\u5706\u7684\u5207\u5272\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

<\/section>\n

\u5185\u5706\u952f<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u7845\u7247\u975e\u5e38\u8106\u5f31\uff0c\u6240\u4ee5\u5207\u5272\u8fc7\u7a0b\u4e5f\u9700\u8981\u5341\u5206\u5c0f\u5fc3\uff0c\u8981\u4e25\u683c\u63a7\u5236\u6e29\u5ea6\u548c\u632f\u52a8\u3002\u5207\u5272\u65f6\uff0c\u9700\u8981\u4f7f\u7528\u6c34\u57fa\u6216\u6cb9\u57fa\u7684\u5207\u5272\u6db2\uff0c\u7528\u6765\u51b7\u5374\u548c\u6da6\u6ed1\uff0c\u4ee5\u53ca\u5e26\u8d70\u5207\u5272\u4ea7\u751f\u7684\u788e\u5c51\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u7b2c\u56db\u6b65\uff0c\u5012\u89d2\u3001\u7814\u78e8\u3001\u629b\u5149\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u5207\u5272\u5f97\u5230\u7684\u7845\u7247\uff0c\u88ab\u79f0\u4e3a\u201c\u88f8\u7247\u201d\uff0c\u5373\u672a\u7ecf\u52a0\u5de5\u7684\u201c\u539f\u6599\u6676\u5706\u201d\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u88f8\u7247\u7684\u8868\u9762\u4f1a\u975e\u5e38\u7c97\u7cd9\uff0c\u800c\u4e14\u4f1a\u6709\u6b8b\u7559\u5207\u5272\u6db2\u548c\u788e\u5c51\u3002\u56e0\u6b64\uff0c\u9700\u8981\u5012\u89d2\u3001\u7814\u78e8\u3001\u629b\u5149\u3001\u6e05\u6d17\u7b49\u5de5\u827a\uff0c\u5b8c\u6210\u5207\u5272\u540e\u7684\u5904\u7406\uff0c\u6700\u7ec8\u5f97\u5230\u5149\u6ed1\u5982\u955c\u7684\u201c\u6210\u54c1\u6676\u5706\uff08Wafer\uff09\u201d\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u5012\u89d2\uff0c\u5c31\u662f\u901a\u8fc7\u5012\u89d2\u673a\uff0c\u628a\u7845\u7247\u8fb9\u7f18\u7684\u76f4\u89d2\u8fb9\u78e8\u6210\u5706\u5f27\u5f62\u3002\u8fd9\u662f\u56e0\u4e3a\u9ad8\u7eaf\u5ea6\u7845\u662f\u4e00\u79cd\u8106\u6027\u5f88\u9ad8\u7684\u6750\u6599\uff0c\u8fd9\u6837\u5904\u7406\u53ef\u4ee5\u964d\u4f4e\u8fb9\u7f18\u5904\u53d1\u751f\u5d29\u88c2\u7684\u98ce\u9669\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u7814\u78e8\uff0c\u5c31\u662f\u7c97\u7814\u78e8\uff0c\u4f7f\u6676\u5706\u7247\u8868\u9762\u5e73\u6574\u3001\u5e73\u884c\uff0c\u51cf\u5c11\u673a\u68b0\u7f3a\u9677\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u7814\u78e8\u540e\uff0c<\/span><\/span>\u6676\u5706\u4f1a\u88ab\u7f6e\u4e8e\u6c2e\u5316\u9178\u4e0e\u4e59\u9178\u7684\u6df7\u5408\u6eb6\u6db2\u4e2d\u8fdb\u884c\u8680\u523b\uff0c\u4ee5\u53bb\u9664\u8868\u9762\u53ef\u80fd\u5b58\u5728\u7684\u5fae\u89c2\u88c2\u7eb9\u6216\u635f\u4f24\u3002\u5b8c\u6210\u8680\u523b\u540e\uff0c\u6676\u5706\u4f1a\u518d\u7ecf\u8fc7\u4e00\u7cfb\u5217\u9ad8\u7eaf\u5ea6\u7684RO\/DI\u6c34\u6d74\u5904\u7406\uff0c\u4ee5\u786e\u4fdd\u5176\u8868\u9762\u7684\u6d01\u51c0\u5ea6\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u6676\u5706\u5728\u4e00\u7cfb\u5217\u5316\u5b66\u548c\u673a\u68b0\u629b\u5149\u8fc7\u7a0b\u4e2d\u629b\u5149\uff0c\u79f0\u4e3a<\/span>CMP\uff08Chemical Mechanical Polish\uff0c\u5316\u5b66\u673a\u68b0\u629b\u5149\uff09<\/span>\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u5176\u4e2d\uff0c\u5316\u5b66\u53cd\u5e94\u9636\u6bb5\uff0c\u629b\u5149\u6db2\u4e2d\u5bcc\u542b\u7684\u5316\u5b66\u6210\u5206\uff0c\u4e0e\u5f85\u5904\u7406\u7684\u6676\u5706\u6750\u6599\u53d1\u751f\u5316\u5b66\u53cd\u5e94\uff0c\u751f\u6210\u6613\u4e8e\u6e05\u9664\u7684\u5316\u5408\u7269\uff0c\u6216\u4f7f\u6750\u6599\u8868\u9762\u8f6f\u5316\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u673a\u68b0\u7814\u78e8\u9636\u6bb5\uff0c\u501f\u52a9\u629b\u5149\u57ab\u548c\u629b\u5149\u6db2\u4e2d\u7684\u78e8\u7c92\uff0c\u5bf9\u6676\u5706\u6750\u6599\u8fdb\u884c\u673a\u68b0\u6027\u7684\u78e8\u524a\uff0c\u4ece\u800c\u53bb\u9664\u5728\u5316\u5b66\u53cd\u5e94\u9636\u6bb5\u751f\u6210\u7684\u5316\u5408\u7269\uff0c\u4ee5\u53ca\u6750\u6599\u8868\u9762\u7684\u5176\u4ed6\u6742\u8d28\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

<\/section>\n


<\/span><\/p>\n

\u5728CMP\u5de5\u827a\u4e2d\uff0c\u9996\u5148\u9700\u8981\u5c06\u5f85\u629b\u5149\u7684\u6676\u5706\u56fa\u5b9a\u5728\u629b\u5149\u673a\u7684\u6676\u5706\u5939\u5177\u4e0a\u3002\u63a5\u7740\uff0c\u629b\u5149\u6db2\u88ab\u5747\u5300\u5730\u5206\u914d\u5728\u6676\u5706\u548c\u629b\u5149\u57ab\u4e4b\u95f4\u3002\u7136\u540e\uff0c\u629b\u5149\u673a\u901a\u8fc7\u65bd\u52a0\u9002\u5f53\u7684\u538b\u529b\u548c\u65cb\u8f6c\u901f\u5ea6\uff0c\u5bf9\u6676\u5706\u8fdb\u884c\u629b\u5149\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

CMP\u662f\u82af\u7247\u5236\u9020\u8fc7\u7a0b\u4e2d\u7684\u4e00\u4e2a\u5e38\u89c1\u5de5\u5e8f\uff08\u540e\u9762\u8fd8\u4f1a\u518d\u7528\u5230\uff09\u3002\u5b83\u7684\u6838\u5fc3\u76ee\u6807\u662f\u5b9e\u73b0\u5168\u5c40\u5e73\u5766\u5316\uff08Global Planarization\uff09\uff0c\u5373\u5728\u7eb3\u7c73\u7ea7\u7cbe\u5ea6\u4e0b\u6d88\u9664\u6676\u5706\u8868\u9762\u7684\u9ad8\u4f4e\u5dee\u5f02\uff08\u5982\u91d1\u5c5e\u5c42\u3001\u4ecb\u8d28\u5c42\u7684\u4e0d\u5747\u5300\u6027\uff09\uff0c\u4e3a\u540e\u7eed\u5149\u523b\u7b49\u5de5\u827a\u505a\u597d\u51c6\u5907\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u7b2c\u4e94\u6b65\uff0c\u6e05\u6d17\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u629b\u5149\u5b8c\u6210\u4e4b\u540e\uff0c\u6676\u5706\u9700\u8981\u7ecf\u8fc7\u5f7b\u5e95\u6e05\u6d17\uff0c\u53bb\u9664\u6b8b\u7559\u7684\u629b\u5149\u6db2\u548c\u78e8\u7c92\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u6e05\u6d17\u901a\u5e38\u5305\u62ec\u9178\u3001\u78b1\u3001\u8d85\u7eaf\u6c34\u51b2\u6d17\u7b49\u591a\u4e2a\u6b65\u9aa4\uff0c\u6bcf\u4e00\u6b65\u540c\u6837\u4e5f\u8981\u6c42\u5728\u6d01\u51c0\u5ba4\u73af\u5883\u4e0b\u8fdb\u884c\uff0c\u4ee5\u907f\u514d\u4efb\u4f55\u65b0\u7684\u6742\u8d28\u9644\u7740\u5728\u6676\u5706\u8868\u9762\u4e0a\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u7b2c\u516d\u6b65\uff0c\u68c0\u6d4b\u548c\u5206\u7c7b\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u629b\u5149\u4e4b\u540e\u5f97\u5230\u7684\u6676\u5706\uff0c\u4e5f\u53eb\u629b\u5149\u7247\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u6700\u540e\uff0c\u4f7f\u7528\u5149\u5b66\u663e\u5fae\u955c\u6216\u5176\u4ed6\u68c0\u6d4b\u8bbe\u5907\u5bf9\u629b\u5149\u6548\u679c\u8fdb\u884c\u4e25\u683c\u68c0\u67e5\uff0c\u786e\u4fdd\u6676\u5706\u7684\u8868\u9762\u5e73\u5766\u5ea6\u3001\u6750\u6599\u53bb\u9664\u91cf\u3001\u539a\u5ea6\u3001\u8868\u9762\u7f3a\u9677\u7b49\u6307\u6807\u5168\u90fd\u7b26\u5408\u9884\u671f\u8981\u6c42\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u68c0\u6d4b\u5408\u683c\u7684\u6676\u5706\uff0c\u5c06\u8fdb\u5165\u4e0b\u4e00\u5de5\u5e8f\u3002\u68c0\u6d4b\u4e0d\u5408\u683c\u7684\uff0c\u8fdb\u884c\u8fd4\u5de5\u6216\u8005\u5e9f\u5f03\u5904\u7406\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

<\/section>\n


<\/span><\/p>\n

\u9700\u8981\u6ce8\u610f\uff01\u5728\u5b9e\u9645\u751f\u4ea7\u4e2d\uff0c\u6676\u5706\u8fb9\u7f18\u4f1a\u5207\u5272\u51fa\u5e73\u89d2\uff08Flat\uff09\u6216\u7f3a\u53e3\uff08Notch\uff09\uff0c\u4ee5\u4fbf\u4e8e\u540e\u7eed\u5de5\u5e8f\u4e2d\u7684\u5b9a\u4f4d\u548c\u6676\u5411\u786e\u5b9a\u3002\u53e6\u5916\uff0c\u5728\u6676\u5706\u7684\u53cd\u9762\u8fb9\u7f18\uff0c\u4e5f\u4f1a\u6253\u4e0a\u5e8f\u53f7\u6807\u7b7e\uff0c\u65b9\u4fbf\u7269\u6599\u8ddf\u8e2a\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n


<\/span><\/p>\n

\u2588<\/span> \u5173\u4e8e\u6676\u5706\u7684\u5e38\u89c1\u95ee\u9898<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u597d\u5566\uff0c\u6676\u5706\u5df2\u7ecf\u5236\u5907\u5b8c\u6210\u4e86\u3002\u63a5\u4e0b\u6765\uff0c\u6211\u4eec\u56de\u7b54\u51e0\u4e2a\u5173\u4e8e\u6676\u5706\u7684\u5e38\u89c1\u95ee\u9898\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u95ee\u98981\uff1a\u6676\u5706\u7684\u5c3a\u5bf8\u6709\u591a\u5927\uff1f<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u7ecf\u8fc7\u5904\u7406\u5f97\u5230\u7684\u6210\u54c1\u6676\u5706\uff0c\u6709\u591a\u79cd\u5c3a\u5bf8\u89c4\u683c\uff0c\u4f8b\u5982\uff1a2\u82f1\u5bf8\uff0850mm\uff09\u30013\u82f1\u5bf8\uff0875mm\uff09\u30014\u82f1\u5bf8\uff08100mm\uff09\u30015\u82f1\u5bf8\uff08125mm\uff09\u30016\u82f1\u5bf8\uff08150mm\uff09\u30018\u82f1\u5bf8\uff08200mm\uff09\u300112\u82f1\u5bf8\uff08300mm\uff09\u7b49\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

<\/section>\n

\u5c0f\u5c3a\u5bf8\u6676\u5706<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u5176\u4e2d\uff0c8\u82f1\u5bf8\u548c12\u82f1\u5bf8\uff0c\u6700\u4e3a\u5e38\u89c1\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u6676\u5706\u7684\u539a\u5ea6\uff0c\u5fc5\u987b\u4e25\u683c\u9075\u5faaSEMI\u89c4\u683c\u7b49\u6807\u51c6\u3002\u4f8b\u5982\uff0c12\u82f1\u5bf8\u6676\u5706\u7684\u539a\u5ea6\uff0c\u901a\u5e38\u63a7\u5236\u5728775\u03bcm\u00b120\u03bcm\uff08\u5fae\u7c73\uff09\u8303\u56f4\u5185\uff0c\u4e5f\u5c31\u662f0.775\u6beb\u7c73\u5de6\u53f3\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u6676\u5706\u5c3a\u5bf8\u8d8a\u5927\uff0c\u6bcf\u7247\u6676\u5706\u53ef\u5236\u9020\u82af\u7247\u6570\u91cf\u5c31\u8d8a\u591a\uff0c\u5355\u4f4d\u82af\u7247\u6210\u672c\u5c31\u8d8a\u4f4e\u3002<\/span><\/span>
<\/span><\/p>\n


<\/span><\/p>\n

\u4ee58\u82f1\u5bf8\u4e0e12\u82f1\u5bf8\u7845\u7247\u4e3a\u4f8b\u3002\u5728\u540c\u6837\u5de5\u827a\u6761\u4ef6\u4e0b\uff0c12\u82f1\u5bf8\u6676\u5706\u53ef\u4f7f\u7528\u9762\u79ef\u8d85\u8fc7 8\u82f1\u5bf8\u6676\u5706\u4e24\u500d\u4ee5\u4e0a\uff0c\u53ef\u4f7f\u7528\u7387\uff08\u8861\u91cf\u5355\u4f4d\u6676\u5706\u53ef\u751f\u4ea7\u82af\u7247\u6570\u91cf\u7684\u6307\u6807\uff09\u662f8\u82f1\u5bf8\u7845\u7247\u76842.5\u500d\u5de6\u53f3\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u4f46\u662f\uff0c\u5c3a\u5bf8\u8d8a\u5927\uff0c\u5c31\u8d8a\u96be\u9020\uff0c\u5bf9\u751f\u4ea7\u6280\u672f\u3001\u8bbe\u5907\u3001\u6750\u6599\u3001\u5de5\u827a\u8981\u6c42\u5c31\u8d8a\u591a\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

12\u82f1\u5bf8\uff0c\u53ef\u4ee5\u5728\u6536\u76ca\u548c\u96be\u5ea6\u4e4b\u95f4\u7ef4\u6301\u4e00\u4e2a\u6bd4\u8f83\u597d\u7684\u5e73\u8861\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u95ee\u98982\uff1a\u6676\u5706\u4e3a\u4ec0\u4e48\u662f\u5706\u7684\uff1f<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u9996\u5148\uff0c\u524d\u9762\u8bf4\u4e86\uff0c\u62c9\u5355\u6676\u62c9\u51fa\u6765\u7684\uff0c\u5c31\u662f\u5706\u67f1\u4f53\uff0c\u6240\u4ee5\uff0c\u5207\u5272\u540e\uff0c\u5c31\u662f\u5706\u76d8\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u5176\u6b21\uff0c\u5706\u67f1\u5f62\u7684\u5355\u6676\u7845\u952d\uff0c\u66f4\u4fbf\u4e8e\u8fd0\u8f93\uff0c\u53ef\u4ee5\u5c3d\u91cf\u907f\u514d\u56e0\u78d5\u78b0\u5bfc\u81f4\u7684\u6750\u6599\u635f\u8017\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u7b2c\u4e09\uff0c\u5706\u5f62\u6676\u5706\u5728\u5236\u9020\u8fc7\u7a0b\u4e2d\uff0c\u66f4\u5bb9\u6613\u5b9e\u73b0\u5747\u5300\u52a0\u70ed\u548c\u51b7\u5374\uff0c\u51cf\u5c11\u70ed\u5e94\u529b\uff0c\u63d0\u9ad8\u6676\u4f53\u8d28\u91cf\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u7b2c\u56db\uff0c<\/span><\/span>\u6676\u5706\u505a\u6210\u5706\u7684\uff0c\u5bf9\u4e8e\u82af\u7247\u7684\u540e\u7eed\u5de5\u827a\uff0c\u4e5f\u6709\u4e00\u5b9a\u5e2e\u52a9\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u7b2c\u4e94\uff0c\u662f\u9762\u79ef\u5229\u7528\u7387\u4e0a\u6709\u4f18\u52bf\u3002\u540e\u9762\u6211\u4eec\u4f1a\u4ecb\u7ecd\uff0c\u6676\u5706\u4e0a\u9762\u4f1a\u5236\u4f5c\u5f88\u591a\u82af\u7247\u3002\u82af\u7247\u786e\u5b9e\u662f\u65b9\u7684\u3002\u4ece\u9053\u7406\u4e0a\u6765\u8bf4\uff0c\u597d\u50cf\u6676\u5706\u662f\u65b9\u7684\uff0c\u66f4\u9002\u5408\u65b9\u5f62\u7684\u82af\u7247\uff08\u8fb9\u7f18\u4e0d\u4f1a\u6709\u6d6a\u8d39\uff09\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

<\/section>\n


<\/span><\/p>\n

\u4f46\u4e8b\u5b9e\u4e0a\uff0c\u5373\u4fbf\u662f\u505a\u6210\u4e86\u201c\u6676\u65b9\u201d\uff0c\u4e00\u4e9b\u8fb9\u7f18\u4ecd\u7136\u662f\u4e0d\u53ef\u5229\u7528\u7684\u3002\u8ba1\u7b97\u6570\u636e\u8868\u660e\uff0c\u5706\u5f62\u8fb9\u7f18\u6bd4\u65b9\u5f62\u6d6a\u8d39\u66f4\u5c11\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u95ee\u98983\uff1a\u6676\u5706\u4e00\u5b9a\u662f\u7845\u6750\u6599\u5417\uff1f<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u4e0d\u4e00\u5b9a\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u4e0d\u53ea\u6709\u7845\u80fd\u505a\u6210\u6676\u5706\u3002\u76ee\u524d\uff0c\u534a\u5bfc\u4f53\u6750\u6599\u5df2\u7ecf\u53d1\u5c55\u5230\u7b2c\u56db\u4ee3\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u7b2c\u4e00\u4ee3\u534a\u5bfc\u4f53\u6750\u6599\u4ee5 Si\uff08\u7845\uff09\u3001Ge\uff08\u9517\uff09\u4e3a\u4ee3\u8868\u3002\u7b2c\u4e8c\u4ee3\u534a\u5bfc\u4f53\u6750\u6599\u4ee5 GaAs\uff08\u7837\u5316\u9553\uff09\u3001InP\uff08\u78f7\u5316\u94df\uff09\u4e3a\u4ee3\u8868\u3002\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u6750\u6599\u4ee5 GaN\uff08\u6c2e\u5316\u9553\uff09\u3001SiC\uff08\u78b3\u5316\u7845\uff09\u4e3a\u4ee3\u8868\u3002\u7b2c\u56db\u4ee3\u534a\u5bfc\u4f53\u6750\u6599\u4ee5\u6c2e\u5316\u94dd\uff08AlN\uff09\u3001\u6c27\u5316\u9553\uff08Ga2O3\uff09\u3001\u91d1\u521a\u77f3\uff08C\uff09\u4e3a\u4ee3\u8868\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u4e0d\u8fc7\uff0c\u76ee\u524d\u4ecd\u670990%\u4ee5\u4e0a\u82af\u7247\u9700\u4f7f\u7528\u534a\u5bfc\u4f53\u7845\u7247\u4f5c\u4e3a\u886c\u5e95\u7247\u3002\u56e0\u4e3a\u5b83\u62e5\u6709<\/span>\u4f18\u5f02\u7684\u534a\u5bfc\u4f53\u6027\u80fd\u3001\u4e30\u5bcc\u7684\u50a8\u91cf\u53ca\u6210\u719f\u7684\u5236\u9020\u5de5\u827a\u3002<\/span><\/p>\n


<\/span><\/p>\n


<\/span><\/p>\n

\u5173\u4e8e\u6676\u5706\u5236\u5907\uff0c\u4eca\u5929\u5c31\u4ecb\u7ecd\u5230\u8fd9\u91cc\u3002<\/span><\/span><\/p>\n


<\/span><\/p>\n

\u4e0b\u4e00\u671f\uff0c\u5c0f\u67a3\u541b\u7ee7\u7eed\u7ed9\u5927\u5bb6\u8bb2\u82af\u7247\u7684\u5236\u9020\u6d41\u7a0b\uff0c\u770b\u770b\u5230\u5e95\u662f\u5982\u4f55\u5728\u6676\u5706\u4e0a\u505a\u51fa\u82af\u7247\u7684\u3002\u656c\u8bf7\u5173\u6ce8\uff01<\/span><\/span><\/p>\n


<\/span><\/p>\n


<\/span><\/p>\n

<\/section>\n<\/p>\n
\n

#\u82af\u7247<\/a><\/p>\n<\/div>\n

\u6587\u7ae0\u8f6c\u8f7d\u81ea\u5fae\u4fe1\u516c\u4f17\u53f7\uff1a\u9c9c\u67a3\u8bfe\u5802<\/p>\n","protected":false},"excerpt":{"rendered":"

\u82af\u7247\uff0c\u662f\u4eba\u7c7b\u79d1\u6280\u7684\u7cbe\u534e\uff0c\u4e5f\u88ab\u79f0\u4e3a\u73b0\u4ee3\u5de5\u4e1a\u7687\u51a0\u4e0a\u7684\u660e\u73e0\u3002 \u82af\u7247\u7684\u57fa\u672c\u7ec4\u6210\u662f\u6676\u4f53\u7ba1\u3002\u6676\u4f53\u7ba1\u7684\u57fa\u672c\u5de5\u4f5c\u539f\u7406\u5176\u5b9e\u5e76\u4e0d\u590d […]<\/p>\n","protected":false},"author":1,"featured_media":2658,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[469],"tags":[584,269,118],"class_list":["post-2656","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-469","tag-584","tag-269","tag-118"],"_links":{"self":[{"href":"http:\/\/www.xzclass.com\/index.php?rest_route=\/wp\/v2\/posts\/2656"}],"collection":[{"href":"http:\/\/www.xzclass.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.xzclass.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.xzclass.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.xzclass.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=2656"}],"version-history":[{"count":1,"href":"http:\/\/www.xzclass.com\/index.php?rest_route=\/wp\/v2\/posts\/2656\/revisions"}],"predecessor-version":[{"id":2659,"href":"http:\/\/www.xzclass.com\/index.php?rest_route=\/wp\/v2\/posts\/2656\/revisions\/2659"}],"wp:featuredmedia":[{"embeddable":true,"href":"http:\/\/www.xzclass.com\/index.php?rest_route=\/wp\/v2\/media\/2658"}],"wp:attachment":[{"href":"http:\/\/www.xzclass.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=2656"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.xzclass.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=2656"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.xzclass.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=2656"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}